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光罩的製造，检验，维修:市场分析与策略性课题
市场调查报告书
商品编码
1266878

光罩的製造，检验，维修:市场分析与策略性课题

Mask Making, Inspection, and Repair: Market Analysis and Strategic Issues
出版日期: | 出版商: Information Network | 英文 | 商品交期: 2-3个工作天内

价格

本报告提供美国及全球半导体产业上光罩製造，检验，维修领域的相关调查，含括影响市场的策略性课题。同时彙整市场各地区趋势与市场预测，市场占有率等资讯。

目录

第1章 简介

第2章 摘要整理

第3章 技术问题

  • 光罩製造
    • 光罩坯料
    • 完成光罩
  • 光罩製造设备
    • 电子束系统
    • 雷射模式发电机
  • 光罩检验
    • 光罩缺陷
  • 光罩维修
    • 雷射维修
    • 聚焦离子束维修
    • 其他的维修方法

第4章 用户-供应商策略

  • 用户需求确立
  • 竞争供应商的机会

第5章 市场预测

  • 促进因素
    • 简介
    • IC製程技术趋势
    • 光罩和Reticle的必要条件
    • 快速周转设备
    • 直接写入电子束和X光的影响
  • 市场预测的前提条件
  • 光罩製造、检验、维修
    • 完成光罩
    • Reticle、光罩製造设备

Each new generation of IC devices brings about a corresponding decrease in linewidths and minimum feature sizes. The technological trends and innovations in IC fabrication processes directly influence the market for masks and mask making equipment. This report examines and projects the technologies involved, their likely developments, why and when their introduction or demise will take place, what problems and choices are facing users, and where the opportunities and pitfalls are.

This report addresses the strategic issues impacting the mask making, inspection, and repair sectors of the semiconductor industry in the U.S. and the world. The mask market is segmented by geographic region. The mask equipment markets are analyzed and projected and market shares presented.

Table of Contents

Chapter 1. Introduction

  • 1.1. The Need For This Report

Chapter 2. Executive Summary

  • 2.1. Summary of Major Issues
  • 2.2. Summary of Market Opportunities

Chapter 3. Technology Issues

  • 3.1. Mask Making
    • 3.1.1. Mask Blanks
    • 3.1.2. Completed Masks
  • 3.2. Mask Making Equipment
    • 3.2.1. Electron Beam Systems
    • 3.2.2. Laser Pattern Generators
  • 3.3. Mask Inspection
    • 3.3.1. Mask Defects
      • Transmission Variations
      • Transparent Defects
      • Nuisance Defects
      • CD Variations
      • Reflectivity Variations
  • 3.4. Mask Repair
    • 3.4.1. Laser Repair
    • 3.4.2. Focused Ion Beam Repair
    • 3.4.3. Other Repair Methods

Chapter 4. User - Vendor Strategies

  • 4.1. Establishing User Needs
    • 4.1.1. Mask Making - Merchant or Captive
    • 4.1.2. Submicron Mask Making Equipment - Laser vs E-Beam
    • 4.1.3. Mask Inspection Equipment
    • 4.1.4. Mask Repair - Laser vs FIB
    • 4.1.5. Phase-Shift Masks
    • 4.1.6. Optical Proximity Correction
    • 4.1.7. NGL Technology Challenges
      • 4.1.7.1. X-Ray Masks
      • 4.1.7.2. EPL Masks
      • 4.1.7.3. EUVL Masks
  • 4.2. Competitive Vendor Opportunities

Chapter 5. Market Forecast

  • 5.1. Driving Forces
    • 5.1.1. Introduction
    • 5.1.2. Trends in IC Processing Technology
    • 5.1.3. Mask and Reticle Requirements
    • 5.1.4. Fast Turnaround Devices
    • 5.1.5. Impact of Direct Write E-Beam and X-Ray
  • 5.2. Market Forecast Assumptions
  • 5.3. Mask Making, Inspection, and Repair
    • 5.3.1. Completed Mask Market
    • 5.3.2. Reticle/Mask Manufacturing Equipment

List of Figures

  • 3.1. Light Transmittance of Glasses
  • 3.2. Photomask Fabrication Flow
  • 3.3. Optical Photomask Fabrication Flow
  • 3.4. SCAPLEL Photomask Fabrication Flow
  • 3.5. MaskRigger Software in a Mask Fabrication Process
  • 3.6. Schematic of a Laser Pattern Generator
  • 3.7. Mulith Reference Distribution Aerial Image Formation
  • 3.8. Die-to-Die and Die-to-Database Inspection
  • 3.9. Defect Inspection Practices
  • 3.10. Percentage of Yield Losses
  • 3.11. Yield for Masks
  • 3.12. Yield for Binary Masks
  • 3.13. Schematic of a Focused Ion Beam System
  • 3.14. Illustration of Clear and Opaque Mask Repair
  • 4.1. Write Time Versus Device Complexity
  • 4.2. Subwavelength Gap
  • 4.3. Lithography Requiements
  • 4.4. Phase-Shifting Masks
  • 4.5. iN Phase Mask Design
  • 4.6. Illustration of OPC
  • 4.7. Main NGL Mask Formats
  • 4.8. Mask Costs Versus Feature Size
  • 5.1. Increasing Mask Complexity
  • 5.2. Production Costs for Maskmaking
  • 5.3. Capital Expenditures and Revenues
  • 5.4. Photomask Functionality
  • 5.5. Worldwide Merchant Mask Making Market Shares
  • 5.6. North American Merchant Mask Making Market Shares
  • 5.7. European Merchant Mask Making Market Shares
  • 5.8. Pacific Rim Merchant Mask Making Market Shares
  • 5.9. Japan Merchant Mask Making Market Shares
  • 5.10. Mask Inspection Market Shares
  • 5.11. Mask Metrology Market Shares
  • 5.12. Mask Repair Market Shares
  • 5-13. Photomask Repair Methods

List of Tables

  • 4.1. FIB and Laser Repair Comparison
  • 4.2. NGL Mask Formats
  • 4.3. Cost of Reticle/X-Ray Mask
  • 4.4. Phase Shift Mask and X-Ray Mask Manufacturing
  • 5.1. Roadmap of Mask Inspection
  • 5.2. IC Lithographic Requirements
  • 5.3. Increasing Mask Complexity
  • 5.4. Worldwide Mask Making Market by Feature Size
  • 5.5. Captive Mask Shops
  • 5.6. Worldwide Mask Making Equipment Market Forecast
  • 5.7. Mask Inspection Market Forecast
  • 5.8. Mask Metrology Market Forecast