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市场调查报告书
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1873433

PVD 和 ALD 涂层在腔室部件中的应用：全球市场份额和排名、总收入和需求预测（2025-2031 年）

PVD and ALD Coating for Chamber Components - Global Market Share and Ranking, Overall Sales and Demand Forecast 2025-2031
出版日期: | 出版商: QYResearch | 英文 92 Pages | 商品交期: 2-3个工作天内

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2024 年全球用于腔室组件的 PVD ​​和 ALD 涂层市场规模估计为 5,370 万美元，预计到 2031 年将达到 9,800 万美元，在预测期（2025-2031 年）内以 9.2% 的复合年增长率增长。

用于腔室组件的PVD和ALD涂层通常基于氧化钇或氧化铝，也可采用氮氧化铝（AlON）製成。具体的化学成分和涂层厚度必须根据应用进行客製化。腔室的工作温度、处理时间和气体成分会因装置规格的不同而显着变化。这些变数用于选择最适合所需涂层性能的涂层组合。客製化设计的精密涂层可在成本和性能之间实现最佳平衡。沉积腔室包含许多与装置晶圆直接接触或暴露于到达晶圆的製程化学品的组件。因此，材料选择至关重要。电浆蚀刻腔室中使用的腐蚀性化学物质会侵蚀设备组件的表面并导致涂层劣化。长时间暴露于3D元件製造中常见的高温等离子体会加速这种劣化。从腐蚀表面脱落的颗粒会沉积在晶圆上，可能导致装置失效。等离子喷涂氧化钇或阳极氧化铝组件长期以来一直是行业标准。儘管这些解决方案已应用多年，但先进製程节点的奈米级结构对系统内所有组件的洁净度提出了更高的要求。采用传统涂层的组件耐久性不足以承受蚀刻和沈积腔室中的恶劣环境，这可能会影响装置产量比率。等离子喷涂涂层相对粗糙且多孔，而阳极氧化涂层则容易出现原位开裂和快速劣化。此外，沉积腔室内组件的复杂几何形状也对热喷涂涂层提出了挑战，因为热喷涂涂层是针对平面最佳化的。精密工程特殊涂层采用与半导体晶圆加工相关的真空薄膜技术，以製造出具有卓越耐腐蚀性和抗氧化性的组件，从而劣化传统涂层的降解。物理沉淀沉积 (PVD) 和原子层沉积 (ALD) 是两种可行的选择。任何精密工程涂层都必须在腐蚀性等离子体和化学环境中提供最小的磨损和耐腐蚀性，同时确保完全附着和均匀的表面覆盖。最佳涂层化学成分和方法取决于待涂覆零件的几何形状和材质、腔室类型以及加工条件。

全球主要企业包括Entegris、KoMiCo和Inficon。前三大公司占了约50%的市场。亚太地区是最大的市场，市占率约58%，其次是北美（35%）和欧洲（7%）。依涂层方法划分，PVD涂层是最大的细分市场，市场占有率为65%。按应用领域划分，蚀刻工具是最大的应用领域，市占率约86%。

本报告旨在对全球腔室零件用 PVD ​​和 ALD 涂层市场按地区/国家、涂层方法和应用进行全面分析，重点关注总收入、市场份额和主要企业的排名。

本报告以2024年为基准年，提供PVD和ALD涂层在腔室零件市场规模、估算和预测的销售收入数据，并涵盖2020年至2031年的历史数据和预测数据。定量和定性分析将帮助读者制定业务和成长策略，评估市场竞争，分析自身在当前市场中的地位，并就PVD和ALD涂层在腔室零件市场做出明智的商业决策。

市场区隔

公司

  • TOCALO Co., Ltd.
  • KoMiCo
  • Cinos
  • WONIK QnC
  • Oerlikon Balzers
  • Beneq
  • Entegris
  • Inficon

涂层法

  • PVD涂层法
  • ALD涂层方法

应用领域

  • 蚀刻设备
  • 薄膜成型设备

按地区

  • 北美洲
    • 美国
    • 加拿大
  • 亚太地区
    • 中国
    • 日本
    • 韩国
    • 东南亚
    • 印度
    • 澳洲
    • 亚太其他地区
  • 欧洲
    • 德国
    • 法国
    • 英国
    • 义大利
    • 荷兰
    • 北欧国家
    • 其他欧洲
  • 拉丁美洲
    • 墨西哥
    • 巴西
    • 其他拉丁美洲
  • 中东和非洲
    • 土耳其
    • 沙乌地阿拉伯
    • 阿拉伯聯合大公国
    • 其他中东和非洲地区

The global market for PVD and ALD Coating for Chamber Components was estimated to be worth US$ 53.7 million in 2024 and is forecast to a readjusted size of US$ 98 million by 2031 with a CAGR of 9.2% during the forecast period 2025-2031.

PVD and ALD coatings for chamber components are typically based on yttrium or aluminum oxides or may be made from aluminum oxynitride (AlON). The exact chemistry and coating thickness must be tailored to the application. The use of temperature in the chamber, processing time, and gases vary considerably depending on the device specifications, and these variables are used to select the right combination of coatings for their desired coating performance. Custom precision-engineered coatings provide the optimal balance between cost and performance. Deposition chambers contain various parts and components that either contact the device wafer directly or are exposed to process chemicals that subsequently reach the wafer. As such, material selection is critical. The corrosive chemicals used in plasma-etch chambers attack the tool component surfaces and degrade coatings. Longer exposure to hotter plasmas, which is common for 3D device processing, accelerates degradation. Particles shed from the corroded surfaces then deposit on the wafers, potentially causing device failure. Components protected with yttrium oxide deposited by plasma spray-coating or made from anodized aluminum have long been the industry norm. Although such solutions have worked for many years, the nano-scale features of advanced process nodes demand an increased level of cleanliness for every part in the system. Conventionally coated components are not rugged enough to withstand the aggressive environments inside etch and deposition chambers without impacting device yield. Plasma spray coatings are relatively rough and porous, while anodized coatings exhibit in-situ cracking that makes them degrade too readily. The complex shapes of parts inside deposition chambers also pose a challenge for spray coating, which works best when coating planar surfaces. Precision engineered, specialized coatings borrow vacuum thin film technologies associated with semiconductor wafer processing to produce coated components that can better resist the corrosion and oxidation that degrade conventional coatings. Two options are available: physical vapor deposition (PVD) and atomic layer deposition (ALD). Every precision engineered coating must exhibit a minimum level of wear and corrosion resistance in the presence of corrosive plasma/chemistry and adhere fully to the underlying substrate to create a uniformly coated surface. The geometry and material of the part being coated, the type of chamber, and the processing conditions further dictate the optimal coating chemistry and method.

Global key players of PVD and ALD Coating for Chamber Components include Entegris, KoMiCo, Inficon, etc. The top three players hold a share about 50%. Asia-Pacific is the largest market, and has a share about 58%, followed by North America and Europe with share 35% and 7%, separately. In terms of Coating Method, PVD Coating Method is the largest segment, accounting for a share of 65%. In terms of application, Etching Tools is the largest field with a share about 86 percent.

This report aims to provide a comprehensive presentation of the global market for PVD and ALD Coating for Chamber Components, focusing on the total sales revenue, key companies market share and ranking, together with an analysis of PVD and ALD Coating for Chamber Components by region & country, by Coating Method, and by Application.

The PVD and ALD Coating for Chamber Components market size, estimations, and forecasts are provided in terms of sales revenue ($ millions), considering 2024 as the base year, with history and forecast data for the period from 2020 to 2031. With both quantitative and qualitative analysis, to help readers develop business/growth strategies, assess the market competitive situation, analyze their position in the current marketplace, and make informed business decisions regarding PVD and ALD Coating for Chamber Components.

Market Segmentation

By Company

  • TOCALO Co., Ltd.
  • KoMiCo
  • Cinos
  • WONIK QnC
  • Oerlikon Balzers
  • Beneq
  • Entegris
  • Inficon

Segment by Coating Method

  • PVD Coating Method
  • ALD Coating Method

Segment by Application

  • Etching Tools
  • Deposition Tools

By Region

  • North America
    • United States
    • Canada
  • Asia-Pacific
    • China
    • Japan
    • South Korea
    • Southeast Asia
    • India
    • Australia
    • Rest of Asia-Pacific
  • Europe
    • Germany
    • France
    • U.K.
    • Italy
    • Netherlands
    • Nordic Countries
    • Rest of Europe
  • Latin America
    • Mexico
    • Brazil
    • Rest of Latin America
  • Middle East & Africa
    • Turkey
    • Saudi Arabia
    • UAE
    • Rest of MEA

Chapter Outline

Chapter 1: Introduces the report scope of the report, global total market size. This chapter also provides the market dynamics, latest developments of the market, the driving factors and restrictive factors of the market, the challenges and risks faced by manufacturers in the industry, and the analysis of relevant policies in the industry.

Chapter 2: Detailed analysis of PVD and ALD Coating for Chamber Components company competitive landscape, revenue market share, latest development plan, merger, and acquisition information, etc.

Chapter 3: Provides the analysis of various market segments by Coating Method, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different market segments.

Chapter 4: Provides the analysis of various market segments by Application, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different downstream markets.

Chapter 5: Revenue of PVD and ALD Coating for Chamber Components in regional level. It provides a quantitative analysis of the market size and development potential of each region and introduces the market development, future development prospects, market space, and market size of each country in the world.

Chapter 6: Revenue of PVD and ALD Coating for Chamber Components in country level. It provides sigmate data by Coating Method, and by Application for each country/region.

Chapter 7: Provides profiles of key players, introducing the basic situation of the main companies in the market in detail, including product revenue, gross margin, product introduction, recent development, etc.

Chapter 8: Analysis of industrial chain, including the upstream and downstream of the industry.

Chapter 9: Conclusion.

Table of Contents

1 Market Overview

  • 1.1 PVD and ALD Coating for Chamber Components Product Introduction
  • 1.2 Global PVD and ALD Coating for Chamber Components Market Size Forecast (2020-2031)
  • 1.3 PVD and ALD Coating for Chamber Components Market Trends & Drivers
    • 1.3.1 PVD and ALD Coating for Chamber Components Industry Trends
    • 1.3.2 PVD and ALD Coating for Chamber Components Market Drivers & Opportunity
    • 1.3.3 PVD and ALD Coating for Chamber Components Market Challenges
    • 1.3.4 PVD and ALD Coating for Chamber Components Market Restraints
  • 1.4 Assumptions and Limitations
  • 1.5 Study Objectives
  • 1.6 Years Considered

2 Competitive Analysis by Company

  • 2.1 Global PVD and ALD Coating for Chamber Components Players Revenue Ranking (2024)
  • 2.2 Global PVD and ALD Coating for Chamber Components Revenue by Company (2020-2025)
  • 2.3 Key Companies PVD and ALD Coating for Chamber Components Manufacturing Base Distribution and Headquarters
  • 2.4 Key Companies PVD and ALD Coating for Chamber Components Product Offered
  • 2.5 Key Companies Time to Begin Mass Production of PVD and ALD Coating for Chamber Components
  • 2.6 PVD and ALD Coating for Chamber Components Market Competitive Analysis
    • 2.6.1 PVD and ALD Coating for Chamber Components Market Concentration Rate (2020-2025)
    • 2.6.2 Global 5 and 10 Largest Companies by PVD and ALD Coating for Chamber Components Revenue in 2024
    • 2.6.3 Global Top Companies by Company Type (Tier 1, Tier 2, and Tier 3) & (based on the Revenue in PVD and ALD Coating for Chamber Components as of 2024)
  • 2.7 Mergers & Acquisitions, Expansion

3 Segmentation by Coating Method

  • 3.1 Introduction by Coating Method
    • 3.1.1 PVD Coating Method
    • 3.1.2 ALD Coating Method
  • 3.2 Global PVD and ALD Coating for Chamber Components Sales Value by Coating Method
    • 3.2.1 Global PVD and ALD Coating for Chamber Components Sales Value by Coating Method (2020 VS 2024 VS 2031)
    • 3.2.2 Global PVD and ALD Coating for Chamber Components Sales Value, by Coating Method (2020-2031)
    • 3.2.3 Global PVD and ALD Coating for Chamber Components Sales Value, by Coating Method (%) (2020-2031)

4 Segmentation by Application

  • 4.1 Introduction by Application
    • 4.1.1 Etching Tools
    • 4.1.2 Deposition Tools
  • 4.2 Global PVD and ALD Coating for Chamber Components Sales Value by Application
    • 4.2.1 Global PVD and ALD Coating for Chamber Components Sales Value by Application (2020 VS 2024 VS 2031)
    • 4.2.2 Global PVD and ALD Coating for Chamber Components Sales Value, by Application (2020-2031)
    • 4.2.3 Global PVD and ALD Coating for Chamber Components Sales Value, by Application (%) (2020-2031)

5 Segmentation by Region

  • 5.1 Global PVD and ALD Coating for Chamber Components Sales Value by Region
    • 5.1.1 Global PVD and ALD Coating for Chamber Components Sales Value by Region: 2020 VS 2024 VS 2031
    • 5.1.2 Global PVD and ALD Coating for Chamber Components Sales Value by Region (2020-2025)
    • 5.1.3 Global PVD and ALD Coating for Chamber Components Sales Value by Region (2026-2031)
    • 5.1.4 Global PVD and ALD Coating for Chamber Components Sales Value by Region (%), (2020-2031)
  • 5.2 North America
    • 5.2.1 North America PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
    • 5.2.2 North America PVD and ALD Coating for Chamber Components Sales Value by Country (%), 2024 VS 2031
  • 5.3 Europe
    • 5.3.1 Europe PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
    • 5.3.2 Europe PVD and ALD Coating for Chamber Components Sales Value by Country (%), 2024 VS 2031
  • 5.4 Asia Pacific
    • 5.4.1 Asia Pacific PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
    • 5.4.2 Asia Pacific PVD and ALD Coating for Chamber Components Sales Value by Region (%), 2024 VS 2031
  • 5.5 South America
    • 5.5.1 South America PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
    • 5.5.2 South America PVD and ALD Coating for Chamber Components Sales Value by Country (%), 2024 VS 2031
  • 5.6 Middle East & Africa
    • 5.6.1 Middle East & Africa PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
    • 5.6.2 Middle East & Africa PVD and ALD Coating for Chamber Components Sales Value by Country (%), 2024 VS 2031

6 Segmentation by Key Countries/Regions

  • 6.1 Key Countries/Regions PVD and ALD Coating for Chamber Components Sales Value Growth Trends, 2020 VS 2024 VS 2031
  • 6.2 Key Countries/Regions PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
  • 6.3 United States
    • 6.3.1 United States PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
    • 6.3.2 United States PVD and ALD Coating for Chamber Components Sales Value by Coating Method (%), 2024 VS 2031
    • 6.3.3 United States PVD and ALD Coating for Chamber Components Sales Value by Application, 2024 VS 2031
  • 6.4 Europe
    • 6.4.1 Europe PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
    • 6.4.2 Europe PVD and ALD Coating for Chamber Components Sales Value by Coating Method (%), 2024 VS 2031
    • 6.4.3 Europe PVD and ALD Coating for Chamber Components Sales Value by Application, 2024 VS 2031
  • 6.5 China
    • 6.5.1 China PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
    • 6.5.2 China PVD and ALD Coating for Chamber Components Sales Value by Coating Method (%), 2024 VS 2031
    • 6.5.3 China PVD and ALD Coating for Chamber Components Sales Value by Application, 2024 VS 2031
  • 6.6 Japan
    • 6.6.1 Japan PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
    • 6.6.2 Japan PVD and ALD Coating for Chamber Components Sales Value by Coating Method (%), 2024 VS 2031
    • 6.6.3 Japan PVD and ALD Coating for Chamber Components Sales Value by Application, 2024 VS 2031
  • 6.7 South Korea
    • 6.7.1 South Korea PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
    • 6.7.2 South Korea PVD and ALD Coating for Chamber Components Sales Value by Coating Method (%), 2024 VS 2031
    • 6.7.3 South Korea PVD and ALD Coating for Chamber Components Sales Value by Application, 2024 VS 2031
  • 6.8 Southeast Asia
    • 6.8.1 Southeast Asia PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
    • 6.8.2 Southeast Asia PVD and ALD Coating for Chamber Components Sales Value by Coating Method (%), 2024 VS 2031
    • 6.8.3 Southeast Asia PVD and ALD Coating for Chamber Components Sales Value by Application, 2024 VS 2031
  • 6.9 India
    • 6.9.1 India PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
    • 6.9.2 India PVD and ALD Coating for Chamber Components Sales Value by Coating Method (%), 2024 VS 2031
    • 6.9.3 India PVD and ALD Coating for Chamber Components Sales Value by Application, 2024 VS 2031

7 Company Profiles

  • 7.1 TOCALO Co., Ltd.
    • 7.1.1 TOCALO Co., Ltd. Profile
    • 7.1.2 TOCALO Co., Ltd. Main Business
    • 7.1.3 TOCALO Co., Ltd. PVD and ALD Coating for Chamber Components Products, Services and Solutions
    • 7.1.4 TOCALO Co., Ltd. PVD and ALD Coating for Chamber Components Revenue (US$ Million) & (2020-2025)
    • 7.1.5 TOCALO Co., Ltd. Recent Developments
  • 7.2 KoMiCo
    • 7.2.1 KoMiCo Profile
    • 7.2.2 KoMiCo Main Business
    • 7.2.3 KoMiCo PVD and ALD Coating for Chamber Components Products, Services and Solutions
    • 7.2.4 KoMiCo PVD and ALD Coating for Chamber Components Revenue (US$ Million) & (2020-2025)
    • 7.2.5 KoMiCo Recent Developments
  • 7.3 Cinos
    • 7.3.1 Cinos Profile
    • 7.3.2 Cinos Main Business
    • 7.3.3 Cinos PVD and ALD Coating for Chamber Components Products, Services and Solutions
    • 7.3.4 Cinos PVD and ALD Coating for Chamber Components Revenue (US$ Million) & (2020-2025)
    • 7.3.5 Cinos Recent Developments
  • 7.4 WONIK QnC
    • 7.4.1 WONIK QnC Profile
    • 7.4.2 WONIK QnC Main Business
    • 7.4.3 WONIK QnC PVD and ALD Coating for Chamber Components Products, Services and Solutions
    • 7.4.4 WONIK QnC PVD and ALD Coating for Chamber Components Revenue (US$ Million) & (2020-2025)
    • 7.4.5 WONIK QnC Recent Developments
  • 7.5 Oerlikon Balzers
    • 7.5.1 Oerlikon Balzers Profile
    • 7.5.2 Oerlikon Balzers Main Business
    • 7.5.3 Oerlikon Balzers PVD and ALD Coating for Chamber Components Products, Services and Solutions
    • 7.5.4 Oerlikon Balzers PVD and ALD Coating for Chamber Components Revenue (US$ Million) & (2020-2025)
    • 7.5.5 Oerlikon Balzers Recent Developments
  • 7.6 Beneq
    • 7.6.1 Beneq Profile
    • 7.6.2 Beneq Main Business
    • 7.6.3 Beneq PVD and ALD Coating for Chamber Components Products, Services and Solutions
    • 7.6.4 Beneq PVD and ALD Coating for Chamber Components Revenue (US$ Million) & (2020-2025)
    • 7.6.5 Beneq Recent Developments
  • 7.7 Entegris
    • 7.7.1 Entegris Profile
    • 7.7.2 Entegris Main Business
    • 7.7.3 Entegris PVD and ALD Coating for Chamber Components Products, Services and Solutions
    • 7.7.4 Entegris PVD and ALD Coating for Chamber Components Revenue (US$ Million) & (2020-2025)
    • 7.7.5 Entegris Recent Developments
  • 7.8 Inficon
    • 7.8.1 Inficon Profile
    • 7.8.2 Inficon Main Business
    • 7.8.3 Inficon PVD and ALD Coating for Chamber Components Products, Services and Solutions
    • 7.8.4 Inficon PVD and ALD Coating for Chamber Components Revenue (US$ Million) & (2020-2025)
    • 7.8.5 Inficon Recent Developments

8 Industry Chain Analysis

  • 8.1 PVD and ALD Coating for Chamber Components Industrial Chain
  • 8.2 PVD and ALD Coating for Chamber Components Upstream Analysis
    • 8.2.1 Key Raw Materials
    • 8.2.2 Raw Materials Key Suppliers
    • 8.2.3 Manufacturing Cost Structure
  • 8.3 Midstream Analysis
  • 8.4 Downstream Analysis (Customers Analysis)
  • 8.5 Sales Model and Sales Channels
    • 8.5.1 PVD and ALD Coating for Chamber Components Sales Model
    • 8.5.2 Sales Channel
    • 8.5.3 PVD and ALD Coating for Chamber Components Distributors

9 Research Findings and Conclusion

10 Appendix

  • 10.1 Research Methodology
    • 10.1.1 Methodology/Research Approach
      • 10.1.1.1 Research Programs/Design
      • 10.1.1.2 Market Size Estimation
      • 10.1.1.3 Market Breakdown and Data Triangulation
    • 10.1.2 Data Source
      • 10.1.2.1 Secondary Sources
      • 10.1.2.2 Primary Sources
  • 10.2 Author Details
  • 10.3 Disclaimer

List of Tables

  • Table 1. PVD and ALD Coating for Chamber Components Market Trends
  • Table 2. PVD and ALD Coating for Chamber Components Market Drivers & Opportunity
  • Table 3. PVD and ALD Coating for Chamber Components Market Challenges
  • Table 4. PVD and ALD Coating for Chamber Components Market Restraints
  • Table 5. Global PVD and ALD Coating for Chamber Components Revenue by Company (2020-2025) & (US$ Million)
  • Table 6. Global PVD and ALD Coating for Chamber Components Revenue Market Share by Company (2020-2025)
  • Table 7. Key Companies PVD and ALD Coating for Chamber Components Manufacturing Base Distribution and Headquarters
  • Table 8. Key Companies PVD and ALD Coating for Chamber Components Product Type
  • Table 9. Key Companies Time to Begin Mass Production of PVD and ALD Coating for Chamber Components
  • Table 10. Global PVD and ALD Coating for Chamber Components Companies Market Concentration Ratio (CR5 and HHI)
  • Table 11. Global Top Companies by Company Type (Tier 1, Tier 2, and Tier 3) & (based on the Revenue in PVD and ALD Coating for Chamber Components as of 2024)
  • Table 12. Mergers & Acquisitions, Expansion Plans
  • Table 13. Global PVD and ALD Coating for Chamber Components Sales Value by Coating Method: 2020 VS 2024 VS 2031 (US$ Million)
  • Table 14. Global PVD and ALD Coating for Chamber Components Sales Value by Coating Method (2020-2025) & (US$ Million)
  • Table 15. Global PVD and ALD Coating for Chamber Components Sales Value by Coating Method (2026-2031) & (US$ Million)
  • Table 16. Global PVD and ALD Coating for Chamber Components Sales Market Share in Value by Coating Method (2020-2025)
  • Table 17. Global PVD and ALD Coating for Chamber Components Sales Market Share in Value by Coating Method (2026-2031)
  • Table 18. Global PVD and ALD Coating for Chamber Components Sales Value by Application: 2020 VS 2024 VS 2031 (US$ Million)
  • Table 19. Global PVD and ALD Coating for Chamber Components Sales Value by Application (2020-2025) & (US$ Million)
  • Table 20. Global PVD and ALD Coating for Chamber Components Sales Value by Application (2026-2031) & (US$ Million)
  • Table 21. Global PVD and ALD Coating for Chamber Components Sales Market Share in Value by Application (2020-2025)
  • Table 22. Global PVD and ALD Coating for Chamber Components Sales Market Share in Value by Application (2026-2031)
  • Table 23. Global PVD and ALD Coating for Chamber Components Sales Value by Region, (2020 VS 2024 VS 2031) & (US$ Million)
  • Table 24. Global PVD and ALD Coating for Chamber Components Sales Value by Region (2020-2025) & (US$ Million)
  • Table 25. Global PVD and ALD Coating for Chamber Components Sales Value by Region (2026-2031) & (US$ Million)
  • Table 26. Global PVD and ALD Coating for Chamber Components Sales Value by Region (2020-2025) & (%)
  • Table 27. Global PVD and ALD Coating for Chamber Components Sales Value by Region (2026-2031) & (%)
  • Table 28. Key Countries/Regions PVD and ALD Coating for Chamber Components Sales Value Growth Trends, (US$ Million): 2020 VS 2024 VS 2031
  • Table 29. Key Countries/Regions PVD and ALD Coating for Chamber Components Sales Value, (2020-2025) & (US$ Million)
  • Table 30. Key Countries/Regions PVD and ALD Coating for Chamber Components Sales Value, (2026-2031) & (US$ Million)
  • Table 31. TOCALO Co., Ltd. Basic Information List
  • Table 32. TOCALO Co., Ltd. Description and Business Overview
  • Table 33. TOCALO Co., Ltd. PVD and ALD Coating for Chamber Components Products, Services and Solutions
  • Table 34. Revenue (US$ Million) in PVD and ALD Coating for Chamber Components Business of TOCALO Co., Ltd. (2020-2025)
  • Table 35. TOCALO Co., Ltd. Recent Developments
  • Table 36. KoMiCo Basic Information List
  • Table 37. KoMiCo Description and Business Overview
  • Table 38. KoMiCo PVD and ALD Coating for Chamber Components Products, Services and Solutions
  • Table 39. Revenue (US$ Million) in PVD and ALD Coating for Chamber Components Business of KoMiCo (2020-2025)
  • Table 40. KoMiCo Recent Developments
  • Table 41. Cinos Basic Information List
  • Table 42. Cinos Description and Business Overview
  • Table 43. Cinos PVD and ALD Coating for Chamber Components Products, Services and Solutions
  • Table 44. Revenue (US$ Million) in PVD and ALD Coating for Chamber Components Business of Cinos (2020-2025)
  • Table 45. Cinos Recent Developments
  • Table 46. WONIK QnC Basic Information List
  • Table 47. WONIK QnC Description and Business Overview
  • Table 48. WONIK QnC PVD and ALD Coating for Chamber Components Products, Services and Solutions
  • Table 49. Revenue (US$ Million) in PVD and ALD Coating for Chamber Components Business of WONIK QnC (2020-2025)
  • Table 50. WONIK QnC Recent Developments
  • Table 51. Oerlikon Balzers Basic Information List
  • Table 52. Oerlikon Balzers Description and Business Overview
  • Table 53. Oerlikon Balzers PVD and ALD Coating for Chamber Components Products, Services and Solutions
  • Table 54. Revenue (US$ Million) in PVD and ALD Coating for Chamber Components Business of Oerlikon Balzers (2020-2025)
  • Table 55. Oerlikon Balzers Recent Developments
  • Table 56. Beneq Basic Information List
  • Table 57. Beneq Description and Business Overview
  • Table 58. Beneq PVD and ALD Coating for Chamber Components Products, Services and Solutions
  • Table 59. Revenue (US$ Million) in PVD and ALD Coating for Chamber Components Business of Beneq (2020-2025)
  • Table 60. Beneq Recent Developments
  • Table 61. Entegris Basic Information List
  • Table 62. Entegris Description and Business Overview
  • Table 63. Entegris PVD and ALD Coating for Chamber Components Products, Services and Solutions
  • Table 64. Revenue (US$ Million) in PVD and ALD Coating for Chamber Components Business of Entegris (2020-2025)
  • Table 65. Entegris Recent Developments
  • Table 66. Inficon Basic Information List
  • Table 67. Inficon Description and Business Overview
  • Table 68. Inficon PVD and ALD Coating for Chamber Components Products, Services and Solutions
  • Table 69. Revenue (US$ Million) in PVD and ALD Coating for Chamber Components Business of Inficon (2020-2025)
  • Table 70. Inficon Recent Developments
  • Table 71. Key Raw Materials Lists
  • Table 72. Raw Materials Key Suppliers Lists
  • Table 73. PVD and ALD Coating for Chamber Components Downstream Customers
  • Table 74. PVD and ALD Coating for Chamber Components Distributors List
  • Table 75. Research Programs/Design for This Report
  • Table 76. Key Data Information from Secondary Sources
  • Table 77. Key Data Information from Primary Sources

List of Figures

  • Figure 1. PVD and ALD Coating for Chamber Components Product Picture
  • Figure 2. Global PVD and ALD Coating for Chamber Components Sales Value, 2020 VS 2024 VS 2031 (US$ Million)
  • Figure 3. Global PVD and ALD Coating for Chamber Components Sales Value (2020-2031) & (US$ Million)
  • Figure 4. PVD and ALD Coating for Chamber Components Report Years Considered
  • Figure 5. Global PVD and ALD Coating for Chamber Components Players Revenue Ranking (2024) & (US$ Million)
  • Figure 6. The 5 and 10 Largest Companies in the World: Market Share by PVD and ALD Coating for Chamber Components Revenue in 2024
  • Figure 7. PVD and ALD Coating for Chamber Components Market Share by Company Type (Tier 1, Tier 2, and Tier 3): 2020 VS 2024
  • Figure 8. PVD Coating Method Picture
  • Figure 9. ALD Coating Method Picture
  • Figure 10. Global PVD and ALD Coating for Chamber Components Sales Value by Coating Method (2020 VS 2024 VS 2031) & (US$ Million)
  • Figure 11. Global PVD and ALD Coating for Chamber Components Sales Value Market Share by Coating Method, 2024 & 2031
  • Figure 12. Product Picture of Etching Tools
  • Figure 13. Product Picture of Deposition Tools
  • Figure 14. Global PVD and ALD Coating for Chamber Components Sales Value by Application (2020 VS 2024 VS 2031) & (US$ Million)
  • Figure 15. Global PVD and ALD Coating for Chamber Components Sales Value Market Share by Application, 2024 & 2031
  • Figure 16. North America PVD and ALD Coating for Chamber Components Sales Value (2020-2031) & (US$ Million)
  • Figure 17. North America PVD and ALD Coating for Chamber Components Sales Value by Country (%), 2024 VS 2031
  • Figure 18. Europe PVD and ALD Coating for Chamber Components Sales Value, (2020-2031) & (US$ Million)
  • Figure 19. Europe PVD and ALD Coating for Chamber Components Sales Value by Country (%), 2024 VS 2031
  • Figure 20. Asia Pacific PVD and ALD Coating for Chamber Components Sales Value, (2020-2031) & (US$ Million)
  • Figure 21. Asia Pacific PVD and ALD Coating for Chamber Components Sales Value by Region (%), 2024 VS 2031
  • Figure 22. South America PVD and ALD Coating for Chamber Components Sales Value, (2020-2031) & (US$ Million)
  • Figure 23. South America PVD and ALD Coating for Chamber Components Sales Value by Country (%), 2024 VS 2031
  • Figure 24. Middle East & Africa PVD and ALD Coating for Chamber Components Sales Value, (2020-2031) & (US$ Million)
  • Figure 25. Middle East & Africa PVD and ALD Coating for Chamber Components Sales Value by Country (%), 2024 VS 2031
  • Figure 26. Key Countries/Regions PVD and ALD Coating for Chamber Components Sales Value (%), (2020-2031)
  • Figure 27. United States PVD and ALD Coating for Chamber Components Sales Value, (2020-2031) & (US$ Million)
  • Figure 28. United States PVD and ALD Coating for Chamber Components Sales Value by Coating Method (%), 2024 VS 2031
  • Figure 29. United States PVD and ALD Coating for Chamber Components Sales Value by Application (%), 2024 VS 2031
  • Figure 30. Europe PVD and ALD Coating for Chamber Components Sales Value, (2020-2031) & (US$ Million)
  • Figure 31. Europe PVD and ALD Coating for Chamber Components Sales Value by Coating Method (%), 2024 VS 2031
  • Figure 32. Europe PVD and ALD Coating for Chamber Components Sales Value by Application (%), 2024 VS 2031
  • Figure 33. China PVD and ALD Coating for Chamber Components Sales Value, (2020-2031) & (US$ Million)
  • Figure 34. China PVD and ALD Coating for Chamber Components Sales Value by Coating Method (%), 2024 VS 2031
  • Figure 35. China PVD and ALD Coating for Chamber Components Sales Value by Application (%), 2024 VS 2031
  • Figure 36. Japan PVD and ALD Coating for Chamber Components Sales Value, (2020-2031) & (US$ Million)
  • Figure 37. Japan PVD and ALD Coating for Chamber Components Sales Value by Coating Method (%), 2024 VS 2031
  • Figure 38. Japan PVD and ALD Coating for Chamber Components Sales Value by Application (%), 2024 VS 2031
  • Figure 39. South Korea PVD and ALD Coating for Chamber Components Sales Value, (2020-2031) & (US$ Million)
  • Figure 40. South Korea PVD and ALD Coating for Chamber Components Sales Value by Coating Method (%), 2024 VS 2031
  • Figure 41. South Korea PVD and ALD Coating for Chamber Components Sales Value by Application (%), 2024 VS 2031
  • Figure 42. Southeast Asia PVD and ALD Coating for Chamber Components Sales Value, (2020-2031) & (US$ Million)
  • Figure 43. Southeast Asia PVD and ALD Coating for Chamber Components Sales Value by Coating Method (%), 2024 VS 2031
  • Figure 44. Southeast Asia PVD and ALD Coating for Chamber Components Sales Value by Application (%), 2024 VS 2031
  • Figure 45. India PVD and ALD Coating for Chamber Components Sales Value, (2020-2031) & (US$ Million)
  • Figure 46. India PVD and ALD Coating for Chamber Components Sales Value by Coating Method (%), 2024 VS 2031
  • Figure 47. India PVD and ALD Coating for Chamber Components Sales Value by Application (%), 2024 VS 2031
  • Figure 48. PVD and ALD Coating for Chamber Components Industrial Chain
  • Figure 49. PVD and ALD Coating for Chamber Components Manufacturing Cost Structure
  • Figure 50. Channels of Distribution (Direct Sales, and Distribution)
  • Figure 51. Bottom-up and Top-down Approaches for This Report
  • Figure 52. Data Triangulation
  • Figure 53. Key Executives Interviewed