The global market for Semiconductor Mask Inspection Device was estimated to be worth US$ 1779 million in 2024 and is forecast to a readjusted size of US$ 3402 million by 2031 with a CAGR of 9.4% during the forecast period 2025-2031.
This report provides a comprehensive assessment of recent tariff adjustments and international strategic countermeasures on Semiconductor Mask Inspection Device cross-border industrial footprints, capital allocation patterns, regional economic interdependencies, and supply chain reconfigurations.
A mask is an original master for transferring IC patterns to the semiconductor wafers. Defects during lithography that exceed expected size must be identified and corrected. Semiconductor devices are manufactured using photomasks, which serve as the source of original patterns for integrated circuits. Semiconductor Mask Inspection Device looks for pattern defects and foreign matter on the surface of the mask. This equipment is used in semiconductor plants to inspect masks received from suppliers, such as mask shops, and to conduct regular inspections of masks during the device production process. Mask inspection equipment is also used by mask shops to inspect masks before shipment to device makers. A major reason why mask inspection equipment is required is that masks often develop a solid growing foreign matter (haze) on their top surface and back side. Masks therefore must be inspected for such impurities before continuing with the semiconductor manufacturing process. The adoption of ArF lithography has increased the level of irradiation light energy. During exposure, gaseous impurities, such as organic substances and ammonia, are present in trace amounts on the mask. Irradiation by a short wavelength laser decomposes these gaseous substances and induces bonding, which often leads to the emergence of a solid growing foreign matter (haze) on the top surface and back side of the mask. Although this haze is microscopic, usually only several tens of nanometers, if it grows it will be transferred to the wafer during the lithography process, resulting in a defective semiconductor device. Defects that are detected after patterns are written on masks include protrusions from the pattern, cracks in the pattern, dirt or dust on the transparent portion, and transparent pinholes in the portion of the pattern that is shielded from light.
Market Growth Drivers
Semiconductor Industry Expansion: Accelerated construction of new wafer fabs globally (28 new plants in 2023, including 20 in mainland China), driving the CAGR of photomask demand to 11.77%.
Localization Acceleration: Current domestic production rate of high-end photomasks remains below 20%, with policy support speeding up local capacity expansion (e.g., SPPI's 130-28nm production line to commence in 2025).
Technology Evolution: EUV lithography and advanced packaging (Chiplet/3D IC) require defect density at nanoscale, forcing inspection equipment upgrades.
Technology Trends
High-Resolution Inspection: Rising adoption of E-beam and X-ray systems for sub-3nm defect detection.
AI Integration: AI algorithms enable 30%+ efficiency gains in defect classification and localization (e.g., KLA-Tencor solutions).
Hybrid Modalities: Optical+E-beam hybrid systems dominate for balanced speed/accuracy (e.g., Lasertec's latest models)46.
Emerging Applications
Micro-LED: Mass transfer processes demand photomask defect rates <0.1ppm, spurring new equipment needs.
Automotive Electronics: AEC-Q100 certification elevates inspection standards, requiring high-temp/high-pressure testing capabilities.
This report aims to provide a comprehensive presentation of the global market for Semiconductor Mask Inspection Device, focusing on the total sales volume, sales revenue, price, key companies market share and ranking, together with an analysis of Semiconductor Mask Inspection Device by region & country, by Type, and by Application.
The Semiconductor Mask Inspection Device market size, estimations, and forecasts are provided in terms of sales volume (Units) and sales revenue ($ millions), considering 2024 as the base year, with history and forecast data for the period from 2020 to 2031. With both quantitative and qualitative analysis, to help readers develop business/growth strategies, assess the market competitive situation, analyze their position in the current marketplace, and make informed business decisions regarding Semiconductor Mask Inspection Device.
Market Segmentation
By Company
- KLA-Tencor
- Applied Materials
- Lasertec
- NuFlare
- Carl Zeiss AG
- Advantest
- VPTEK
- YUWEITEK
Segment by Type
- Photomask Detection Equipment
- Photomask Substrate Testing Equipment
Segment by Application
- Semiconductor Chip Manufacturer
- Mask Factory
- Substrate Manufacturer
By Region
- North America
- Asia-Pacific
- China
- Japan
- South Korea
- Southeast Asia
- India
- Australia
- Rest of Asia-Pacific
- Europe
- Germany
- France
- U.K.
- Italy
- Netherlands
- Nordic Countries
- Rest of Europe
- Latin America
- Mexico
- Brazil
- Rest of Latin America
- Middle East & Africa
- Turkey
- Saudi Arabia
- UAE
- Rest of MEA
Chapter Outline
Chapter 1: Introduces the report scope of the report, global total market size (value, volume and price). This chapter also provides the market dynamics, latest developments of the market, the driving factors and restrictive factors of the market, the challenges and risks faced by manufacturers in the industry, and the analysis of relevant policies in the industry.
Chapter 2: Detailed analysis of Semiconductor Mask Inspection Device manufacturers competitive landscape, price, sales and revenue market share, latest development plan, merger, and acquisition information, etc.
Chapter 3: Provides the analysis of various market segments by Type, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different market segments.
Chapter 4: Provides the analysis of various market segments by Application, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different downstream markets.
Chapter 5: Sales, revenue of Semiconductor Mask Inspection Device in regional level. It provides a quantitative analysis of the market size and development potential of each region and introduces the market development, future development prospects, market space, and market size of each country in the world.
Chapter 6: Sales, revenue of Semiconductor Mask Inspection Device in country level. It provides sigmate data by Type, and by Application for each country/region.
Chapter 7: Provides profiles of key players, introducing the basic situation of the main companies in the market in detail, including product sales, revenue, price, gross margin, product introduction, recent development, etc.
Chapter 8: Analysis of industrial chain, including the upstream and downstream of the industry.
Chapter 9: Conclusion.
Table of Contents
1 Market Overview
- 1.1 Semiconductor Mask Inspection Device Product Introduction
- 1.2 Global Semiconductor Mask Inspection Device Market Size Forecast
- 1.2.1 Global Semiconductor Mask Inspection Device Sales Value (2020-2031)
- 1.2.2 Global Semiconductor Mask Inspection Device Sales Volume (2020-2031)
- 1.2.3 Global Semiconductor Mask Inspection Device Sales Price (2020-2031)
- 1.3 Semiconductor Mask Inspection Device Market Trends & Drivers
- 1.3.1 Semiconductor Mask Inspection Device Industry Trends
- 1.3.2 Semiconductor Mask Inspection Device Market Drivers & Opportunity
- 1.3.3 Semiconductor Mask Inspection Device Market Challenges
- 1.3.4 Semiconductor Mask Inspection Device Market Restraints
- 1.4 Assumptions and Limitations
- 1.5 Study Objectives
- 1.6 Years Considered
2 Competitive Analysis by Company
- 2.1 Global Semiconductor Mask Inspection Device Players Revenue Ranking (2024)
- 2.2 Global Semiconductor Mask Inspection Device Revenue by Company (2020-2025)
- 2.3 Global Semiconductor Mask Inspection Device Players Sales Volume Ranking (2024)
- 2.4 Global Semiconductor Mask Inspection Device Sales Volume by Company Players (2020-2025)
- 2.5 Global Semiconductor Mask Inspection Device Average Price by Company (2020-2025)
- 2.6 Key Manufacturers Semiconductor Mask Inspection Device Manufacturing Base and Headquarters
- 2.7 Key Manufacturers Semiconductor Mask Inspection Device Product Offered
- 2.8 Key Manufacturers Time to Begin Mass Production of Semiconductor Mask Inspection Device
- 2.9 Semiconductor Mask Inspection Device Market Competitive Analysis
- 2.9.1 Semiconductor Mask Inspection Device Market Concentration Rate (2020-2025)
- 2.9.2 Global 5 and 10 Largest Manufacturers by Semiconductor Mask Inspection Device Revenue in 2024
- 2.9.3 Global Top Manufacturers by Company Type (Tier 1, Tier 2, and Tier 3) & (based on the Revenue in Semiconductor Mask Inspection Device as of 2024)
- 2.10 Mergers & Acquisitions, Expansion
3 Segmentation by Type
- 3.1 Introduction by Type
- 3.1.1 Photomask Detection Equipment
- 3.1.2 Photomask Substrate Testing Equipment
- 3.2 Global Semiconductor Mask Inspection Device Sales Value by Type
- 3.2.1 Global Semiconductor Mask Inspection Device Sales Value by Type (2020 VS 2024 VS 2031)
- 3.2.2 Global Semiconductor Mask Inspection Device Sales Value, by Type (2020-2031)
- 3.2.3 Global Semiconductor Mask Inspection Device Sales Value, by Type (%) (2020-2031)
- 3.3 Global Semiconductor Mask Inspection Device Sales Volume by Type
- 3.3.1 Global Semiconductor Mask Inspection Device Sales Volume by Type (2020 VS 2024 VS 2031)
- 3.3.2 Global Semiconductor Mask Inspection Device Sales Volume, by Type (2020-2031)
- 3.3.3 Global Semiconductor Mask Inspection Device Sales Volume, by Type (%) (2020-2031)
- 3.4 Global Semiconductor Mask Inspection Device Average Price by Type (2020-2031)
4 Segmentation by Application
- 4.1 Introduction by Application
- 4.1.1 Semiconductor Chip Manufacturer
- 4.1.2 Mask Factory
- 4.1.3 Substrate Manufacturer
- 4.2 Global Semiconductor Mask Inspection Device Sales Value by Application
- 4.2.1 Global Semiconductor Mask Inspection Device Sales Value by Application (2020 VS 2024 VS 2031)
- 4.2.2 Global Semiconductor Mask Inspection Device Sales Value, by Application (2020-2031)
- 4.2.3 Global Semiconductor Mask Inspection Device Sales Value, by Application (%) (2020-2031)
- 4.3 Global Semiconductor Mask Inspection Device Sales Volume by Application
- 4.3.1 Global Semiconductor Mask Inspection Device Sales Volume by Application (2020 VS 2024 VS 2031)
- 4.3.2 Global Semiconductor Mask Inspection Device Sales Volume, by Application (2020-2031)
- 4.3.3 Global Semiconductor Mask Inspection Device Sales Volume, by Application (%) (2020-2031)
- 4.4 Global Semiconductor Mask Inspection Device Average Price by Application (2020-2031)
5 Segmentation by Region
- 5.1 Global Semiconductor Mask Inspection Device Sales Value by Region
- 5.1.1 Global Semiconductor Mask Inspection Device Sales Value by Region: 2020 VS 2024 VS 2031
- 5.1.2 Global Semiconductor Mask Inspection Device Sales Value by Region (2020-2025)
- 5.1.3 Global Semiconductor Mask Inspection Device Sales Value by Region (2026-2031)
- 5.1.4 Global Semiconductor Mask Inspection Device Sales Value by Region (%), (2020-2031)
- 5.2 Global Semiconductor Mask Inspection Device Sales Volume by Region
- 5.2.1 Global Semiconductor Mask Inspection Device Sales Volume by Region: 2020 VS 2024 VS 2031
- 5.2.2 Global Semiconductor Mask Inspection Device Sales Volume by Region (2020-2025)
- 5.2.3 Global Semiconductor Mask Inspection Device Sales Volume by Region (2026-2031)
- 5.2.4 Global Semiconductor Mask Inspection Device Sales Volume by Region (%), (2020-2031)
- 5.3 Global Semiconductor Mask Inspection Device Average Price by Region (2020-2031)
- 5.4 North America
- 5.4.1 North America Semiconductor Mask Inspection Device Sales Value, 2020-2031
- 5.4.2 North America Semiconductor Mask Inspection Device Sales Value by Country (%), 2024 VS 2031
- 5.5 Europe
- 5.5.1 Europe Semiconductor Mask Inspection Device Sales Value, 2020-2031
- 5.5.2 Europe Semiconductor Mask Inspection Device Sales Value by Country (%), 2024 VS 2031
- 5.6 Asia Pacific
- 5.6.1 Asia Pacific Semiconductor Mask Inspection Device Sales Value, 2020-2031
- 5.6.2 Asia Pacific Semiconductor Mask Inspection Device Sales Value by Region (%), 2024 VS 2031
- 5.7 South America
- 5.7.1 South America Semiconductor Mask Inspection Device Sales Value, 2020-2031
- 5.7.2 South America Semiconductor Mask Inspection Device Sales Value by Country (%), 2024 VS 2031
- 5.8 Middle East & Africa
- 5.8.1 Middle East & Africa Semiconductor Mask Inspection Device Sales Value, 2020-2031
- 5.8.2 Middle East & Africa Semiconductor Mask Inspection Device Sales Value by Country (%), 2024 VS 2031
6 Segmentation by Key Countries/Regions
- 6.1 Key Countries/Regions Semiconductor Mask Inspection Device Sales Value Growth Trends, 2020 VS 2024 VS 2031
- 6.2 Key Countries/Regions Semiconductor Mask Inspection Device Sales Value and Sales Volume
- 6.2.1 Key Countries/Regions Semiconductor Mask Inspection Device Sales Value, 2020-2031
- 6.2.2 Key Countries/Regions Semiconductor Mask Inspection Device Sales Volume, 2020-2031
- 6.3 United States
- 6.3.1 United States Semiconductor Mask Inspection Device Sales Value, 2020-2031
- 6.3.2 United States Semiconductor Mask Inspection Device Sales Value by Type (%), 2024 VS 2031
- 6.3.3 United States Semiconductor Mask Inspection Device Sales Value by Application, 2024 VS 2031
- 6.4 Europe
- 6.4.1 Europe Semiconductor Mask Inspection Device Sales Value, 2020-2031
- 6.4.2 Europe Semiconductor Mask Inspection Device Sales Value by Type (%), 2024 VS 2031
- 6.4.3 Europe Semiconductor Mask Inspection Device Sales Value by Application, 2024 VS 2031
- 6.5 China
- 6.5.1 China Semiconductor Mask Inspection Device Sales Value, 2020-2031
- 6.5.2 China Semiconductor Mask Inspection Device Sales Value by Type (%), 2024 VS 2031
- 6.5.3 China Semiconductor Mask Inspection Device Sales Value by Application, 2024 VS 2031
- 6.6 Japan
- 6.6.1 Japan Semiconductor Mask Inspection Device Sales Value, 2020-2031
- 6.6.2 Japan Semiconductor Mask Inspection Device Sales Value by Type (%), 2024 VS 2031
- 6.6.3 Japan Semiconductor Mask Inspection Device Sales Value by Application, 2024 VS 2031
- 6.7 South Korea
- 6.7.1 South Korea Semiconductor Mask Inspection Device Sales Value, 2020-2031
- 6.7.2 South Korea Semiconductor Mask Inspection Device Sales Value by Type (%), 2024 VS 2031
- 6.7.3 South Korea Semiconductor Mask Inspection Device Sales Value by Application, 2024 VS 2031
- 6.8 Southeast Asia
- 6.8.1 Southeast Asia Semiconductor Mask Inspection Device Sales Value, 2020-2031
- 6.8.2 Southeast Asia Semiconductor Mask Inspection Device Sales Value by Type (%), 2024 VS 2031
- 6.8.3 Southeast Asia Semiconductor Mask Inspection Device Sales Value by Application, 2024 VS 2031
- 6.9 India
- 6.9.1 India Semiconductor Mask Inspection Device Sales Value, 2020-2031
- 6.9.2 India Semiconductor Mask Inspection Device Sales Value by Type (%), 2024 VS 2031
- 6.9.3 India Semiconductor Mask Inspection Device Sales Value by Application, 2024 VS 2031
7 Company Profiles
- 7.1 KLA-Tencor
- 7.1.1 KLA-Tencor Company Information
- 7.1.2 KLA-Tencor Introduction and Business Overview
- 7.1.3 KLA-Tencor Semiconductor Mask Inspection Device Sales, Revenue, Price and Gross Margin (2020-2025)
- 7.1.4 KLA-Tencor Semiconductor Mask Inspection Device Product Offerings
- 7.1.5 KLA-Tencor Recent Development
- 7.2 Applied Materials
- 7.2.1 Applied Materials Company Information
- 7.2.2 Applied Materials Introduction and Business Overview
- 7.2.3 Applied Materials Semiconductor Mask Inspection Device Sales, Revenue, Price and Gross Margin (2020-2025)
- 7.2.4 Applied Materials Semiconductor Mask Inspection Device Product Offerings
- 7.2.5 Applied Materials Recent Development
- 7.3 Lasertec
- 7.3.1 Lasertec Company Information
- 7.3.2 Lasertec Introduction and Business Overview
- 7.3.3 Lasertec Semiconductor Mask Inspection Device Sales, Revenue, Price and Gross Margin (2020-2025)
- 7.3.4 Lasertec Semiconductor Mask Inspection Device Product Offerings
- 7.3.5 Lasertec Recent Development
- 7.4 NuFlare
- 7.4.1 NuFlare Company Information
- 7.4.2 NuFlare Introduction and Business Overview
- 7.4.3 NuFlare Semiconductor Mask Inspection Device Sales, Revenue, Price and Gross Margin (2020-2025)
- 7.4.4 NuFlare Semiconductor Mask Inspection Device Product Offerings
- 7.4.5 NuFlare Recent Development
- 7.5 Carl Zeiss AG
- 7.5.1 Carl Zeiss AG Company Information
- 7.5.2 Carl Zeiss AG Introduction and Business Overview
- 7.5.3 Carl Zeiss AG Semiconductor Mask Inspection Device Sales, Revenue, Price and Gross Margin (2020-2025)
- 7.5.4 Carl Zeiss AG Semiconductor Mask Inspection Device Product Offerings
- 7.5.5 Carl Zeiss AG Recent Development
- 7.6 Advantest
- 7.6.1 Advantest Company Information
- 7.6.2 Advantest Introduction and Business Overview
- 7.6.3 Advantest Semiconductor Mask Inspection Device Sales, Revenue, Price and Gross Margin (2020-2025)
- 7.6.4 Advantest Semiconductor Mask Inspection Device Product Offerings
- 7.6.5 Advantest Recent Development
- 7.7 VPTEK
- 7.7.1 VPTEK Company Information
- 7.7.2 VPTEK Introduction and Business Overview
- 7.7.3 VPTEK Semiconductor Mask Inspection Device Sales, Revenue, Price and Gross Margin (2020-2025)
- 7.7.4 VPTEK Semiconductor Mask Inspection Device Product Offerings
- 7.7.5 VPTEK Recent Development
- 7.8 YUWEITEK
- 7.8.1 YUWEITEK Company Information
- 7.8.2 YUWEITEK Introduction and Business Overview
- 7.8.3 YUWEITEK Semiconductor Mask Inspection Device Sales, Revenue, Price and Gross Margin (2020-2025)
- 7.8.4 YUWEITEK Semiconductor Mask Inspection Device Product Offerings
- 7.8.5 YUWEITEK Recent Development
8 Industry Chain Analysis
- 8.1 Semiconductor Mask Inspection Device Industrial Chain
- 8.2 Semiconductor Mask Inspection Device Upstream Analysis
- 8.2.1 Key Raw Materials
- 8.2.2 Raw Materials Key Suppliers
- 8.2.3 Manufacturing Cost Structure
- 8.3 Midstream Analysis
- 8.4 Downstream Analysis (Customers Analysis)
- 8.5 Sales Model and Sales Channels
- 8.5.1 Semiconductor Mask Inspection Device Sales Model
- 8.5.2 Sales Channel
- 8.5.3 Semiconductor Mask Inspection Device Distributors
9 Research Findings and Conclusion
10 Appendix
- 10.1 Research Methodology
- 10.1.1 Methodology/Research Approach
- 10.1.1.1 Research Programs/Design
- 10.1.1.2 Market Size Estimation
- 10.1.1.3 Market Breakdown and Data Triangulation
- 10.1.2 Data Source
- 10.1.2.1 Secondary Sources
- 10.1.2.2 Primary Sources
- 10.2 Author Details
- 10.3 Disclaimer