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市场调查报告书
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1852415

2025年全球干蚀刻设备市场报告

Dry Etching Equipment Global Market Report 2025
出版日期: | 出版商: The Business Research Company | 英文 250 Pages | 商品交期: 2-10个工作天内

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简介目录

近年来，干式蚀刻设备市场规模强劲成长，从2024年的110.2亿美元成长到2025年的119.4亿美元，复合年增长率为8.4%。这段历史时期的成长主要得益于对小型化电子设备需求的不断增长、半导体在家用电子电器中的应用日益广泛、积体电路产量的不断扩大、对晶圆代工设备的投资不断增加以及製造製程自动化的广泛应用。

预计未来几年干式蚀刻设备市场将强劲成长，到2029年将达到162.4亿美元，复合年增长率为8.0%。预测期内的成长主要源于以下因素：3D NAND和FinFET技术的日益普及、先进节点晶片需求的不断增长、高效能运算设备需求的不断增长、储存晶片製造投资的不断增长以及可穿戴电子产品需求的不断增长。预计推动成长的主要趋势包括电浆蚀刻製程的进步、原子层蚀刻系统的创新、5奈米以下蚀刻工具的研发投入、异质整合干蚀技术的进步以及人工智慧製程控制系统的普及。

干式蚀刻系统是一种半导体製造工具，它使用等离子或反应气体来取代液体化学品从基板上去除材料。它们能够在微晶片上高精度地创建精细图案和复杂结构，同时最大限度地减少对周围区域的损伤。透过提供受控的异向性蚀刻，这些系统在包括积体电路在内的先进装置製造中发挥关键作用。

干式蚀刻设备主要包括感应耦合电浆（ICP）蚀刻、电容耦合电浆蚀刻、反应离子蚀刻和深反应离子蚀刻。 ICP蚀刻是一种高密度等离子体技术，利用感应线圈产生等离子体，实现半导体材料的高精度、异向性和高深长宽比蚀刻。这些系统的关键部件包括蚀刻腔体、气控系统、电源、冷却系统和软体/控制系统。设备有多种配置，包括批量蚀刻机、单晶圆蚀刻机、量产蚀刻机、模组化蚀刻系统和先进的自动化蚀刻工具。这些系统广泛应用于半导体製造、电子机械系统（MEMS）、LED製造等领域，服务电子、汽车、航太、医疗保健等产业的终端用户。

2025年春季，美国关税上调及其引发的贸易摩擦对机械产业造成了重大衝击，导致钢材、液压系统和精密轴承等关键零件的成本上升，而这些零件通常从受影响地区进口。由于许多长期合约阻碍了价格的即时调整，施工机械、农业和工业机械製造商正面临净利率。不确定性也推迟了对自动化和智慧机械技术的投资，减缓了生产力的提升。为了应对这一变化，企业正在加快开发本地供应商，重新设计产品以使用替代材料，并利用预测性维护来延长设备使用寿命，以应对不断上升的更换成本。

干蚀刻设备市场研究报告是商业研究公司最新报告系列的一部分，该系列提供干蚀刻设备市场统计数据，例如全球市场规模、区域份额、竞争对手的市场份额、详细的干法蚀刻设备细分市场、市场趋势以及干蚀刻设备行业的商机。本干式蚀刻设备市场研究报告对该行业的现状和未来趋势进行了详细分析，为您提供所需的一切观点。

预计未来几年对半导体装置的需求不断增长将推动干蚀刻设备市场的发展。半导体装置是利用半导体材料的独特性质来控制电流的电子元件。这种需求很大程度上是由消费性电子产业的快速扩张所驱动，因为智慧型手机、笔记型电脑和智慧家庭产品等设备都依赖先进的晶片来提高效能和功能。干蚀刻设备透过在硅晶片上精确地塑造和图形化微电路来支援半导体製造，从而实现更高性能、更小尺寸和更高效的电子元件。例如，根据电子情报技术产业协会的数据，2023 年 5 月日本的电子设备产量达到 56 亿美元（7,714.57 亿日圆）。家用电子电器产量从 2022 年 5 月的 1.83 亿美元（252.68 亿日圆）增加到 2.33 亿美元（320.99 亿日圆）。对半导体装置的这种不断增长的需求正在推动干蚀刻设备市场的成长。

干式蚀刻设备市场的新兴市场正在开发创新解决方案，例如基于电浆蚀刻的工具，以提高半导体製造的精度、扩充性和效率。电浆蚀刻系统使用电离气体从基板上去除材料，从而实现微尺度图案和结构的精确且可控的蚀刻。例如，2024 年 11 月，日本日立高新科技公司推出了 DCR 蚀刻系统 9060 系列，专为原子层级的等向性（水平）蚀刻而设计。该系统采用电浆蚀刻技术支援 3D-NAND 和 3D-DRAM 等先进3D半导体装置的製造。透过将独特的晶圆冷却机制与快速改变晶圆温度的红外线灯相结合，该系统能够对晶圆图案形状进行原子级控制，这对于复杂的 3D 架构至关重要，同时实现高通量处理和紧凑的占地面积。该系统适用于研发和量产，有助于缩短开发週期、降低成本并提高半导体製造生产率。

2023年11月，美国等离子处理设备供应商Plasma-Therm LLC收购了Thin Film Equipment SRL，具体金额未揭露。此次收购将使Plasma-Therm扩大其欧洲业务，这是其长期策略成长计画的一部分，并透过整合TFE专为MEMS、电源、RFID和其他半导体应用设计的实体气相沉积(PVD)设备套件，显着扩展其功率装置产品线。总部位于义大利的Thin Film Equipment SRL专注于用于干蚀刻技术的半导体和MEMS设备。

干式蚀刻设备市场由提供安装和试运行服务、维护和维修服务、製程开发和最佳化服务、培训和技术支援服务以及升级和维修服务等服务的营业单位所获得的收益组成。市场价值还包括服务供应商销售的或包含在其服务产品中的相关商品的价值。干蚀刻设备市场还包括金属蚀刻系统、电介质蚀刻系统和混合蚀刻系统的销售。换句话说，它是商品製造商或生产商向其他营业单位（包括下游製造商、批发商、经销商和零售商）或直接向最终客户销售的商品的价值。该市场中的商品价值还包括商品製造商销售的任何相关服务。

目录

第一章执行摘要

第二章 市场特征

第三章 市场趋势与策略

第四章 市场：宏观经济情景，包括利率、通膨、地缘政治、贸易战和关税，以及新冠疫情和復苏对市场的影响

第五章 全球成长分析与策略分析框架

  • 全球干蚀刻设备：PESTEL分析（政治、社会、技术、环境、法律因素、驱动因素与限制因素）
  • 最终用途产业分析
  • 全球干蚀刻设备市场：成长率分析
  • 全球干蚀刻设备市场表现：规模与成长，2019-2024
  • 全球干蚀刻设备市场预测：规模与成长，2024-2029年，2034年
  • 全球干蚀刻设备：总潜在市场（TAM）

第六章 市场细分

  • 全球干蚀刻设备市场：按类型、性能和预测，2019-2024 年、2024-2029 年、2034 年
  • 感应耦合电浆蚀刻
  • 电容耦合等电浆蚀刻
  • 反应离子蚀刻
  • 深反应离子蚀刻
  • 其他类型
  • 全球干蚀刻设备市场：按组件类型、性能和预测，2019-2024 年、2024-2029 年、2034 年
  • 蚀刻室
  • 气体控制系统
  • 电源
  • 冷却系统
  • 软体和控制系统
  • 全球干蚀刻设备市场：依设备、性能和预测，2019-2024 年、2024-2029 年、2034 年
  • 批量蚀刻设备
  • 单晶圆蚀刻设备
  • 量产蚀刻设备
  • 模组化蚀刻系统
  • 自动化程度高的蚀刻工具
  • 全球干蚀刻设备市场：按应用、性能和预测，2019-2024 年、2024-2029 年、2034 年
  • 半导体製造
  • 电子机械系统（MEMS）
  • 发光二极体製造
  • 其他用途
  • 全球干蚀刻设备市场：依最终用户、绩效及预测，2019-2024 年、2024-2029 年、2034 年
  • 电子产品
  • 车
  • 航太
  • 卫生保健
  • 其他最终用户
  • 全球干蚀刻设备市场：感应耦合电浆蚀刻细分（按类型）、实际结果和预测，2019-2024 年、2024-2029 年、2034 年
  • 高密度等离子系统
  • 低压等离子系统
  • 先进的晶圆蚀刻系统
  • 全球干蚀刻设备市场：电容耦合等电浆蚀刻细分（按类型）、绩效及预测，2019-2024 年、2024-2029 年、2034 年
  • 平行板等电浆蚀刻系统
  • 中频等离子系统
  • 单晶圆加工系统
  • 全球干蚀刻设备市场：依反应离子蚀刻细分（按类型）、绩效及预测，2019-2024 年、2024-2029 年、2034 年
  • 平行板反应离子蚀刻系统
  • 高选择性蚀刻系统
  • 低损伤蚀刻系统
  • 全球干蚀刻设备市场：依深度反应离子蚀刻细分（按类型）、绩效及预测，2019-2024 年、2024-2029 年、2034 年
  • 博世製程蚀刻系统
  • 低温蚀刻系统
  • 高深长宽比蚀刻系统
  • 全球干蚀刻设备市场：按类型（其他）细分、实际结果和预测，2019-2024 年、2024-2029 年、2034 年
  • 微波等电浆蚀刻系统
  • 中性束蚀刻系统
  • 原子层蚀刻系统

第七章 区域和国家分析

  • 全球干蚀刻设备市场：按地区、结果和预测，2019-2024 年、2024-2029 年、2034 年
  • 全球干蚀刻设备市场：按国家/地区、结果和预测，2019-2024 年、2024-2029 年、2034 年

第八章 亚太市场

第九章：中国市场

第十章 印度市场

第十一章 日本市场

第十二章：澳洲市场

第十三章 印尼市场

第十四章 韩国市场

第十五章：西欧市场

第十六章英国市场

第十七章：德国市场

第18章：法国市场

第十九章：义大利市场

第20章：西班牙市场

第21章 东欧市场

第22章：俄罗斯市场

第23章 北美市场

第24章美国市场

第25章：加拿大市场

第26章 南美洲市场

第27章：巴西市场

第28章 中东市场

第29章：非洲市场

第30章：竞争格局与公司概况

  • 干式蚀刻设备市场：竞争格局
  • 干蚀刻设备市场：公司简介
    • Panasonic Corporation Overview, Products and Services, Strategy and Financial Analysis
    • Applied Materials Inc. Overview, Products and Services, Strategy and Financial Analysis
    • Lam Research Corporation Overview, Products and Services, Strategy and Financial Analysis
    • Tokyo Electron Limited Overview, Products and Services, Strategy and Financial Analysis
    • KLA Corporation Overview, Products and Services, Strategy and Financial Analysis

第31章：其他领先和创新企业

  • Hitachi High-Technologies Corporation
  • NAURA Technology Group Co. Ltd.
  • DISCO Corporation
  • Advanced Energy Industries Inc.
  • ULVAC Inc.
  • Advanced Micro-Fabrication Equipment Inc.
  • Oxford Instruments plc
  • Shibaura Mechatronics Corporation
  • GigaLane Co. Ltd.
  • Plasma-Therm LLC
  • Samco Inc.
  • SENTECH Instruments GmbH
  • Plasma Etch Inc.
  • Nano-Master Inc.
  • PVA TePla AG

第 32 章全球市场竞争基准化分析与仪表板

第33章 重大併购

第34章近期市场趋势

第 35 章：高潜力市场国家、细分市场与策略

  • 2029年干式蚀刻设备市场：提供新机会的国家
  • 2029年干式蚀刻设备市场：细分市场带来新机会
  • 2029年干式蚀刻设备市场：成长策略
    • 基于市场趋势的策略
    • 竞争对手策略

第36章 附录

简介目录
Product Code: r38121

Dry etching equipment is a semiconductor manufacturing tool that removes material from a substrate using plasma or reactive gases instead of liquid chemicals. It enables the creation of fine patterns and complex structures on microchips with high precision while minimizing damage to surrounding areas. This equipment plays a key role in advanced device fabrication, including integrated circuits, by providing controlled, anisotropic etching.

The main types of dry etching equipment include inductively coupled plasma (ICP) etching, capacitively coupled plasma etching, reactive ion etching, deep reactive ion etching, and others. ICP etching is a high-density plasma technique that uses inductive coils to generate plasma, allowing precise, anisotropic, and high-aspect-ratio etching of semiconductor materials. Key components of these systems include etch chambers, gas control systems, power supplies, cooling systems, and software/control systems. The equipment is available in various configurations, such as batch etchers, single-wafer etchers, high-volume production etchers, modular etching systems, and advanced automated etch tools. These systems are widely applied in semiconductor fabrication, micro-electro-mechanical systems (MEMS), LED production, and other areas, serving end users across electronics, automotive, aerospace, healthcare, and more.

Note that the outlook for this market is being affected by rapid changes in trade relations and tariffs globally. The report will be updated prior to delivery to reflect the latest status, including revised forecasts and quantified impact analysis. The report's Recommendations and Conclusions sections will be updated to give strategies for entities dealing with the fast-moving international environment.

The swift increase in U.S. tariffs and the ensuing trade tensions in spring 2025 are significantly affecting the machinery sector by increasing costs for steel, hydraulic systems, and precision bearings critical components often imported from tariff-affected regions. Manufacturers of construction, agricultural, and industrial machinery now face squeezed margins, as many long-term contracts prevent immediate price adjustments. The uncertainty has also delayed investment in automation and smart machinery technologies, slowing productivity gains. To adapt, firms are accelerating local supplier development, redesigning products to use alternative materials, and leveraging predictive maintenance to extend equipment lifespans amid higher replacement costs.

The dry etching equipment market research report is one of a series of new reports from The Business Research Company that provides dry etching equipment market statistics, including dry etching equipment industry global market size, regional shares, competitors with a dry etching equipment market share, detailed dry etching equipment market segments, market trends and opportunities, and any further data you may need to thrive in the dry etching equipment industry. This dry etching equipment market research report delivers a complete perspective of everything you need, with an in-depth analysis of the current and future scenario of the industry.

The dry etching equipment market size has grown strongly in recent years. It will grow from $11.02 billion in 2024 to $11.94 billion in 2025 at a compound annual growth rate (CAGR) of 8.4%. The growth observed during the historic period was driven by rising demand for compact electronic devices, increased use of semiconductors in consumer electronics, expanding production of integrated circuits, growing investments in foundry facilities, and wider adoption of automation in fabrication processes.

The dry etching equipment market size is expected to see strong growth in the next few years. It will grow to $16.24 billion in 2029 at a compound annual growth rate (CAGR) of 8.0%. The projected growth during the forecast period is driven by the expanding use of 3D NAND and FinFET technologies, rising demand for advanced node chips, increasing need for high-performance computing devices, growing investments in memory chip manufacturing, and higher demand for wearable electronics. Key trends expected include advancements in plasma etching processes, innovations in atomic layer etching systems, R&D investment in sub-5nm etching tools, developments in dry etching for heterogeneous integration, and adoption of AI-powered process control systems.

The growing demand for semiconductor devices is expected to propel the dry etching equipment market in the coming years. Semiconductor devices are electronic components that control electrical current by utilizing the unique properties of semiconductor materials. This demand is largely driven by the rapid expansion of the consumer electronics sector, as devices such as smartphones, laptops, and smart home products rely on advanced chips for enhanced performance and functionality. Dry etching equipment supports semiconductor manufacturing by precisely shaping and patterning microscopic circuits on silicon wafers, enabling higher performance, miniaturization, and improved efficiency in electronic components. For example, according to the Japan Electronics and Information Technology Industries Association, Japan's electronic equipment production reached $5.6 billion (771,457 million yen) in May 2023. The output of consumer electronics increased to $233 million (32,099 million yen), up from $183 million (25,268 million yen) in May 2022. This rising demand for semiconductor devices is therefore driving the growth of the dry etching equipment market.

Leading players in the dry etching equipment market are developing innovative solutions, including plasma etching-based tools, to improve precision, scalability, and efficiency in semiconductor fabrication. Plasma etching equipment uses ionized gases to remove material from substrates, enabling precise and controlled etching of micro-scale patterns and structures. For example, in November 2024, Japan-based Hitachi High-Technologies Corporation launched the DCR Etch System 9060 Series, designed for precise isotropic (horizontal) etching at the atomic layer level. The system employs plasma etching technology to support the fabrication of advanced three-dimensional semiconductor devices, such as 3D-NAND and 3D-DRAM. It offers high-throughput processing and a compact footprint through a unique wafer-cooling mechanism combined with an infrared lamp that rapidly alternates wafer temperatures, allowing atomic-level control of wafer pattern shapes essential for complex 3D architectures. The system is suitable for both R&D and mass production, helping reduce development cycles, lower costs, and boost productivity in semiconductor manufacturing.

In November 2023, U.S.-based plasma processing equipment provider Plasma-Therm LLC acquired Thin Film Equipment SRL for an undisclosed sum. This acquisition enables Plasma-Therm to expand its European footprint as part of its long-term strategic growth plan and significantly broaden its power device offerings by integrating TFE's suite of physical vapor deposition (PVD) tools designed for MEMS, power, RFID, and other semiconductor applications. Thin Film Equipment SRL, headquartered in Italy, specializes in semiconductor and MEMS equipment for dry-etch technologies.

Major players in the dry etching equipment market are Panasonic Corporation, Applied Materials Inc., Lam Research Corporation, Tokyo Electron Limited, KLA Corporation, Hitachi High-Technologies Corporation, NAURA Technology Group Co. Ltd., DISCO Corporation, Advanced Energy Industries Inc., ULVAC Inc., Advanced Micro-Fabrication Equipment Inc., Oxford Instruments plc, Shibaura Mechatronics Corporation, GigaLane Co. Ltd., Plasma-Therm LLC, Samco Inc., SENTECH Instruments GmbH, Plasma Etch Inc., Nano-Master Inc., PVA TePla AG.

Asia-Pacific was the largest region in the dry etching equipment market in 2024. Asia-Pacific is expected to be the fastest-growing region in the forecast period. The regions covered in dry etching equipment report are Asia-Pacific, Western Europe, Eastern Europe, North America, South America, Middle East and Africa.

The countries covered in the dry etching equipment market report are Australia, Brazil, China, France, Germany, India, Indonesia, Japan, Russia, South Korea, UK, USA, Canada, Italy, Spain.

The dry etching equipment market consists of revenues earned by entities by providing services such as installation and commissioning services, maintenance and repair services, process development and optimization services, training and technical support services, and upgrade and retrofit services. The market value includes the value of related goods sold by the service provider or included within the service offering. The dry etching equipment market also includes sales of metal etching systems, dielectric etching systems, and hybrid etching systems. Values in this market are 'factory gate' values; that is, the value of goods sold by the manufacturers or creators of the goods, whether to other entities (including downstream manufacturers, wholesalers, distributors, and retailers) or directly to end customers. The value of goods in this market includes related services sold by the creators of the goods

The market value is defined as the revenues that enterprises gain from the sale of goods and/or services within the specified market and geography through sales, grants, or donations in terms of the currency (in USD unless otherwise specified).

The revenues for a specified geography are consumption values that are revenues generated by organizations in the specified geography within the market, irrespective of where they are produced. It does not include revenues from resales along the supply chain, either further along the supply chain or as part of other products.

Dry Etching Equipment Global Market Report 2025 from The Business Research Company provides strategists, marketers and senior management with the critical information they need to assess the market.

This report focuses on dry etching equipment market which is experiencing strong growth. The report gives a guide to the trends which will be shaping the market over the next ten years and beyond.

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Where is the largest and fastest growing market for dry etching equipment ? How does the market relate to the overall economy, demography and other similar markets? What forces will shape the market going forward, including technological disruption, regulatory shifts, and changing consumer preferences? The dry etching equipment market global report from the Business Research Company answers all these questions and many more.

The report covers market characteristics, size and growth, segmentation, regional and country breakdowns, competitive landscape, market shares, trends and strategies for this market. It traces the market's historic and forecast market growth by geography.

  • The market characteristics section of the report defines and explains the market.
  • The market size section gives the market size ($b) covering both the historic growth of the market, and forecasting its development.
  • The forecasts are made after considering the major factors currently impacting the market. These include:

The forecasts are made after considering the major factors currently impacting the market. These include the technological advancements such as AI and automation, Russia-Ukraine war, trade tariffs (government-imposed import/export duties), elevated inflation and interest rates.

  • Market segmentations break down the market into sub markets.
  • The regional and country breakdowns section gives an analysis of the market in each geography and the size of the market by geography and compares their historic and forecast growth.
  • The competitive landscape chapter gives a description of the competitive nature of the market, market shares, and a description of the leading companies. Key financial deals which have shaped the market in recent years are identified.
  • The trends and strategies section analyses the shape of the market as it emerges from the crisis and suggests how companies can grow as the market recovers.

Scope

  • Markets Covered:1) By Type: Inductively Coupled Plasma Etching; Capacitive Coupled Plasma Etching; Reactive Ion Etching; Deep Reactive Ion Etching; Others Types
  • 2) By Component Type: Etch Chambers; Gas Control Systems; Power Supplies; Cooling Systems; Software And Control Systems
  • 3) By Equipment Type: Batch Etchers; Single Wafer Etchers; High Volume Production Etchers; Modular Etching Systems; Etch Tools With Advanced Automation
  • 4) By Application: Semiconductor Manufacturing; Micro-Electro-Mechanical Systems; Light Emitting Diode Production; Other Applications
  • 5) By End-User: Electronics; Automotive; Aerospace; Healthcare; Other End-Users
  • Subsegments:
  • 1) By Inductively Coupled Plasma Etching: High Density Plasma Systems; Low Pressure Plasma Systems; Advanced Wafer Etching Systems
  • 2) By Capacitive Coupled Plasma Etching: Parallel Plate Plasma Etching Systems; Medium Frequency Plasma Systems; Single Wafer Processing Systems
  • 3) By Reactive Ion Etching: Parallel Plate Reactive Ion Etching Systems; High Selectivity Etching Systems; Low Damage Etching Systems
  • 4) By Deep Reactive Ion Etching: Bosch Process Etching Systems; Cryogenic Process Etching Systems; High Aspect Ratio Etching Systems
  • 5) By Others Types: Microwave Plasma Etching Systems; Neutral Beam Etching Systems; Atomic Layer Etching Systems
  • Companies Mentioned: Panasonic Corporation; Applied Materials Inc.; Lam Research Corporation; Tokyo Electron Limited; KLA Corporation; Hitachi High-Technologies Corporation; NAURA Technology Group Co. Ltd.; DISCO Corporation; Advanced Energy Industries Inc.; ULVAC Inc.; Advanced Micro-Fabrication Equipment Inc.; Oxford Instruments plc; Shibaura Mechatronics Corporation; GigaLane Co. Ltd.; Plasma-Therm LLC; Samco Inc.; SENTECH Instruments GmbH; Plasma Etch Inc.; Nano-Master Inc.; PVA TePla AG
  • Countries: Australia; Brazil; China; France; Germany; India; Indonesia; Japan; Russia; South Korea; UK; USA; Canada; Italy; Spain.
  • Regions: Asia-Pacific; Western Europe; Eastern Europe; North America; South America; Middle East; Africa
  • Time Series: Five years historic and ten years forecast.
  • Data: Ratios of market size and growth to related markets, GDP proportions, expenditure per capita,
  • Data Segmentations: country and regional historic and forecast data, market share of competitors, market segments.
  • Sourcing and Referencing: Data and analysis throughout the report is sourced using end notes.
  • Delivery Format: PDF, Word and Excel Data Dashboard.

Table of Contents

1. Executive Summary

2. Dry Etching Equipment Market Characteristics

3. Dry Etching Equipment Market Trends And Strategies

4. Dry Etching Equipment Market - Macro Economic Scenario Including The Impact Of Interest Rates, Inflation, Geopolitics, Trade Wars and Tariffs, And Covid And Recovery On The Market

  • 4.1. Supply Chain Impact from Tariff War & Trade Protectionism

5. Global Dry Etching Equipment Growth Analysis And Strategic Analysis Framework

  • 5.1. Global Dry Etching Equipment PESTEL Analysis (Political, Social, Technological, Environmental and Legal Factors, Drivers and Restraints)
  • 5.2. Analysis Of End Use Industries
  • 5.3. Global Dry Etching Equipment Market Growth Rate Analysis
  • 5.4. Global Dry Etching Equipment Historic Market Size and Growth, 2019 - 2024, Value ($ Billion)
  • 5.5. Global Dry Etching Equipment Forecast Market Size and Growth, 2024 - 2029, 2034F, Value ($ Billion)
  • 5.6. Global Dry Etching Equipment Total Addressable Market (TAM)

6. Dry Etching Equipment Market Segmentation

  • 6.1. Global Dry Etching Equipment Market, Segmentation By Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • Inductively Coupled Plasma Etching
  • Capacitive Coupled Plasma Etching
  • Reactive Ion Etching
  • Deep Reactive Ion Etching
  • Other Types
  • 6.2. Global Dry Etching Equipment Market, Segmentation By Component Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • Etch Chambers
  • Gas Control Systems
  • Power Supplies
  • Cooling Systems
  • Software And Control Systems
  • 6.3. Global Dry Etching Equipment Market, Segmentation By Equipment Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • Batch Etchers
  • Single Wafer Etchers
  • High Volume Production Etchers
  • Modular Etching Systems
  • Etch Tools With Advanced Automation
  • 6.4. Global Dry Etching Equipment Market, Segmentation By Application, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • Semiconductor Manufacturing
  • Micro-Electro-Mechanical Systems (MEMS)
  • Light Emitting Diode Production
  • Other Applications
  • 6.5. Global Dry Etching Equipment Market, Segmentation By End-User, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • Electronics
  • Automotive
  • Aerospace
  • Healthcare
  • Other End-Users
  • 6.6. Global Dry Etching Equipment Market, Sub-Segmentation Of Inductively Coupled Plasma Etching, By Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • High Density Plasma Systems
  • Low Pressure Plasma Systems
  • Advanced Wafer Etching Systems
  • 6.7. Global Dry Etching Equipment Market, Sub-Segmentation Of Capacitive Coupled Plasma Etching, By Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • Parallel Plate Plasma Etching Systems
  • Medium Frequency Plasma Systems
  • Single Wafer Processing Systems
  • 6.8. Global Dry Etching Equipment Market, Sub-Segmentation Of Reactive Ion Etching, By Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • Parallel Plate Reactive Ion Etching Systems
  • High Selectivity Etching Systems
  • Low Damage Etching Systems
  • 6.9. Global Dry Etching Equipment Market, Sub-Segmentation Of Deep Reactive Ion Etching, By Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • Bosch Process Etching Systems
  • Cryogenic Process Etching Systems
  • High Aspect Ratio Etching Systems
  • 6.10. Global Dry Etching Equipment Market, Sub-Segmentation Of Other Types, By Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • Microwave Plasma Etching Systems
  • Neutral Beam Etching Systems
  • Atomic Layer Etching Systems

7. Dry Etching Equipment Market Regional And Country Analysis

  • 7.1. Global Dry Etching Equipment Market, Split By Region, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • 7.2. Global Dry Etching Equipment Market, Split By Country, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion

8. Asia-Pacific Dry Etching Equipment Market

  • 8.1. Asia-Pacific Dry Etching Equipment Market Overview
  • Region Information, Market Information, Background Information, Government Initiatives, Regulations, Regulatory Bodies, Major Associations, Taxes Levied, Corporate Tax Structure, Investments, Major Companies
  • 8.2. Asia-Pacific Dry Etching Equipment Market, Segmentation By Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • 8.3. Asia-Pacific Dry Etching Equipment Market, Segmentation By Component Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • 8.4. Asia-Pacific Dry Etching Equipment Market, Segmentation By Equipment Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion

9. China Dry Etching Equipment Market

  • 9.1. China Dry Etching Equipment Market Overview
  • 9.2. China Dry Etching Equipment Market, Segmentation By Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F,$ Billion
  • 9.3. China Dry Etching Equipment Market, Segmentation By Component Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F,$ Billion
  • 9.4. China Dry Etching Equipment Market, Segmentation By Equipment Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F,$ Billion

10. India Dry Etching Equipment Market

  • 10.1. India Dry Etching Equipment Market, Segmentation By Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • 10.2. India Dry Etching Equipment Market, Segmentation By Component Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • 10.3. India Dry Etching Equipment Market, Segmentation By Equipment Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion

11. Japan Dry Etching Equipment Market

  • 11.1. Japan Dry Etching Equipment Market Overview
  • 11.2. Japan Dry Etching Equipment Market, Segmentation By Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • 11.3. Japan Dry Etching Equipment Market, Segmentation By Component Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • 11.4. Japan Dry Etching Equipment Market, Segmentation By Equipment Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion

12. Australia Dry Etching Equipment Market

  • 12.1. Australia Dry Etching Equipment Market, Segmentation By Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • 12.2. Australia Dry Etching Equipment Market, Segmentation By Component Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • 12.3. Australia Dry Etching Equipment Market, Segmentation By Equipment Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion

13. Indonesia Dry Etching Equipment Market

  • 13.1. Indonesia Dry Etching Equipment Market, Segmentation By Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • 13.2. Indonesia Dry Etching Equipment Market, Segmentation By Component Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • 13.3. Indonesia Dry Etching Equipment Market, Segmentation By Equipment Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion

14. South Korea Dry Etching Equipment Market

  • 14.1. South Korea Dry Etching Equipment Market Overview
  • 14.2. South Korea Dry Etching Equipment Market, Segmentation By Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • 14.3. South Korea Dry Etching Equipment Market, Segmentation By Component Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • 14.4. South Korea Dry Etching Equipment Market, Segmentation By Equipment Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion

15. Western Europe Dry Etching Equipment Market

  • 15.1. Western Europe Dry Etching Equipment Market Overview
  • 15.2. Western Europe Dry Etching Equipment Market, Segmentation By Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • 15.3. Western Europe Dry Etching Equipment Market, Segmentation By Component Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • 15.4. Western Europe Dry Etching Equipment Market, Segmentation By Equipment Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion

16. UK Dry Etching Equipment Market

  • 16.1. UK Dry Etching Equipment Market, Segmentation By Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • 16.2. UK Dry Etching Equipment Market, Segmentation By Component Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • 16.3. UK Dry Etching Equipment Market, Segmentation By Equipment Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion

17. Germany Dry Etching Equipment Market

  • 17.1. Germany Dry Etching Equipment Market, Segmentation By Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • 17.2. Germany Dry Etching Equipment Market, Segmentation By Component Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • 17.3. Germany Dry Etching Equipment Market, Segmentation By Equipment Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion

18. France Dry Etching Equipment Market

  • 18.1. France Dry Etching Equipment Market, Segmentation By Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • 18.2. France Dry Etching Equipment Market, Segmentation By Component Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • 18.3. France Dry Etching Equipment Market, Segmentation By Equipment Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion

19. Italy Dry Etching Equipment Market

  • 19.1. Italy Dry Etching Equipment Market, Segmentation By Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • 19.2. Italy Dry Etching Equipment Market, Segmentation By Component Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • 19.3. Italy Dry Etching Equipment Market, Segmentation By Equipment Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion

20. Spain Dry Etching Equipment Market

  • 20.1. Spain Dry Etching Equipment Market, Segmentation By Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • 20.2. Spain Dry Etching Equipment Market, Segmentation By Component Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • 20.3. Spain Dry Etching Equipment Market, Segmentation By Equipment Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion

21. Eastern Europe Dry Etching Equipment Market

  • 21.1. Eastern Europe Dry Etching Equipment Market Overview
  • 21.2. Eastern Europe Dry Etching Equipment Market, Segmentation By Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • 21.3. Eastern Europe Dry Etching Equipment Market, Segmentation By Component Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • 21.4. Eastern Europe Dry Etching Equipment Market, Segmentation By Equipment Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion

22. Russia Dry Etching Equipment Market

  • 22.1. Russia Dry Etching Equipment Market, Segmentation By Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • 22.2. Russia Dry Etching Equipment Market, Segmentation By Component Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • 22.3. Russia Dry Etching Equipment Market, Segmentation By Equipment Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion

23. North America Dry Etching Equipment Market

  • 23.1. North America Dry Etching Equipment Market Overview
  • 23.2. North America Dry Etching Equipment Market, Segmentation By Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • 23.3. North America Dry Etching Equipment Market, Segmentation By Component Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • 23.4. North America Dry Etching Equipment Market, Segmentation By Equipment Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion

24. USA Dry Etching Equipment Market

  • 24.1. USA Dry Etching Equipment Market Overview
  • 24.2. USA Dry Etching Equipment Market, Segmentation By Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • 24.3. USA Dry Etching Equipment Market, Segmentation By Component Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • 24.4. USA Dry Etching Equipment Market, Segmentation By Equipment Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion

25. Canada Dry Etching Equipment Market

  • 25.1. Canada Dry Etching Equipment Market Overview
  • 25.2. Canada Dry Etching Equipment Market, Segmentation By Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • 25.3. Canada Dry Etching Equipment Market, Segmentation By Component Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • 25.4. Canada Dry Etching Equipment Market, Segmentation By Equipment Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion

26. South America Dry Etching Equipment Market

  • 26.1. South America Dry Etching Equipment Market Overview
  • 26.2. South America Dry Etching Equipment Market, Segmentation By Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • 26.3. South America Dry Etching Equipment Market, Segmentation By Component Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • 26.4. South America Dry Etching Equipment Market, Segmentation By Equipment Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion

27. Brazil Dry Etching Equipment Market

  • 27.1. Brazil Dry Etching Equipment Market, Segmentation By Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • 27.2. Brazil Dry Etching Equipment Market, Segmentation By Component Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • 27.3. Brazil Dry Etching Equipment Market, Segmentation By Equipment Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion

28. Middle East Dry Etching Equipment Market

  • 28.1. Middle East Dry Etching Equipment Market Overview
  • 28.2. Middle East Dry Etching Equipment Market, Segmentation By Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • 28.3. Middle East Dry Etching Equipment Market, Segmentation By Component Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • 28.4. Middle East Dry Etching Equipment Market, Segmentation By Equipment Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion

29. Africa Dry Etching Equipment Market

  • 29.1. Africa Dry Etching Equipment Market Overview
  • 29.2. Africa Dry Etching Equipment Market, Segmentation By Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • 29.3. Africa Dry Etching Equipment Market, Segmentation By Component Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • 29.4. Africa Dry Etching Equipment Market, Segmentation By Equipment Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion

30. Dry Etching Equipment Market Competitive Landscape And Company Profiles

  • 30.1. Dry Etching Equipment Market Competitive Landscape
  • 30.2. Dry Etching Equipment Market Company Profiles
    • 30.2.1. Panasonic Corporation Overview, Products and Services, Strategy and Financial Analysis
    • 30.2.2. Applied Materials Inc. Overview, Products and Services, Strategy and Financial Analysis
    • 30.2.3. Lam Research Corporation Overview, Products and Services, Strategy and Financial Analysis
    • 30.2.4. Tokyo Electron Limited Overview, Products and Services, Strategy and Financial Analysis
    • 30.2.5. KLA Corporation Overview, Products and Services, Strategy and Financial Analysis

31. Dry Etching Equipment Market Other Major And Innovative Companies

  • 31.1. Hitachi High-Technologies Corporation
  • 31.2. NAURA Technology Group Co. Ltd.
  • 31.3. DISCO Corporation
  • 31.4. Advanced Energy Industries Inc.
  • 31.5. ULVAC Inc.
  • 31.6. Advanced Micro-Fabrication Equipment Inc.
  • 31.7. Oxford Instruments plc
  • 31.8. Shibaura Mechatronics Corporation
  • 31.9. GigaLane Co. Ltd.
  • 31.10. Plasma-Therm LLC
  • 31.11. Samco Inc.
  • 31.12. SENTECH Instruments GmbH
  • 31.13. Plasma Etch Inc.
  • 31.14. Nano-Master Inc.
  • 31.15. PVA TePla AG

32. Global Dry Etching Equipment Market Competitive Benchmarking And Dashboard

33. Key Mergers And Acquisitions In The Dry Etching Equipment Market

34. Recent Developments In The Dry Etching Equipment Market

35. Dry Etching Equipment Market High Potential Countries, Segments and Strategies

  • 35.1 Dry Etching Equipment Market In 2029 - Countries Offering Most New Opportunities
  • 35.2 Dry Etching Equipment Market In 2029 - Segments Offering Most New Opportunities
  • 35.3 Dry Etching Equipment Market In 2029 - Growth Strategies
    • 35.3.1 Market Trend Based Strategies
    • 35.3.2 Competitor Strategies

36. Appendix

  • 36.1. Abbreviations
  • 36.2. Currencies
  • 36.3. Historic And Forecast Inflation Rates
  • 36.4. Research Inquiries
  • 36.5. The Business Research Company
  • 36.6. Copyright And Disclaimer