晶圆清洗设备市场 - 全球产业规模、份额、趋势、机会和预测，按设备类型、晶圆尺寸、功能、应用、地区和竞争格局划分，2021-2031年预测

全球晶圆清洗设备市场规模将从2025年的72.3亿美元成长到2031年的114.2亿美元，复合年增长率（CAGR）为7.92%。晶圆清洗设备包含专门的精密机械，旨在清除半导体晶圆表面的杂质，例如颗粒物、有机污染物和金属残留物，同时不会损坏精密的电路图案。市场成长的根本动力来自于晶体管架构向小型化方向的转变以及人工智慧晶片大规模生产的扩张，这些都需要绝对的表面完整性来确保良率可靠性。

主要市场驱动因素

半导体节点的微型化和3D架构的演进，对高精度污染物去除策略提出了更高的要求，以维持装置性能和良率。随着製造商向环栅（GAA）和垂直3D NAND结构等复杂电晶体设计转型，为防止高纵横比特征出现致命缺陷，所需的清洗步骤也随之增加。

主要市场挑战

在先进製程节点上清洗高深宽比结构所涉及的技术复杂性，对晶圆清洗设备市场的扩张构成了重大障碍。随着半导体架构向日益脆弱的设计过渡，有效去除杂质所需的物理力也带来了更高的结构坍塌或图案损坏风险。

主要市场趋势

随着半导体製造商在提高良率的同时，也日益重视环境永续性和法规遵循性，采用无硫酸绿色清洗化学品已成为关键趋势。与严重依赖硫酸和过氧化物等腐蚀性溶剂的传统製程不同，这种转变着重于使用无害、可生物降解的替代品，从而最大限度地降低危险废物处理成本，并减少产业的碳足迹。

目录

第一章：产品概述

第二章：研究方法

第三章：执行概要

第四章：顾客之声

第五章：全球晶圆清洗设备市场展望

• 市场规模及预测
  • 按价值
• 市占率及预测
  • 依晶圆尺寸（300毫米、200毫米、125毫米）
  • 依功能分类（手动设备、自动设备、半自动设备）
  • 按下应用领域（LED、MEMS、记忆体、射频元件、其他）
  • 按地区
  • 按公司（2025 年）
• 市场地图

第六章：北美晶圆清洗设备市场展望

• 市场规模及预测
• 市占率及预测
• 北美洲：国家分析
  • 美国
  • 加拿大
  • 墨西哥

第七章：欧洲晶圆清洗设备市场展望

• 市场规模及预测
• 市占率及预测
• 欧洲：国家分析
  • 德国
  • 法国
  • 英国
  • 义大利
  • 西班牙

第八章：亚太地区晶圆清洗设备市场展望

• 市场规模及预测
• 市占率及预测
• 亚太地区：国家分析
  • 中国
  • 印度
  • 日本
  • 韩国
  • 澳洲

第九章：中东和非洲晶圆清洗设备市场展望

• 市场规模及预测
• 市占率及预测
• 中东和非洲：国家分析
  • 沙乌地阿拉伯
  • 阿联酋
  • 南非

第十章：南美洲晶圆清洗设备市场展望

• 市场规模及预测
• 市占率及预测
• 南美洲：国家分析
  • 巴西
  • 哥伦比亚
  • 阿根廷

第十一章：市场动态

• 司机
• 挑战

第十二章：市场趋势与发展

• 併购
• 产品发布
• 最新进展

第十三章：全球晶圆清洗设备市场：SWOT分析

第十四章：波特五力分析

• 产业竞争
• 新进入者的潜力
• 供应商议价能力
• 顾客的力量
• 替代产品的威胁

第十五章：竞争格局

• Applied Materials, Inc.
• Lam Research Corporation
• SCREEN Holdings Co., Ltd.
• Tokyo Electron Limited
• Veeco Instruments Inc.
• Modutek Corporation
• ACM Research, Inc.
• Entegris, Inc.
• Shibaura Mechatronics Corporation
• PVA TePla AG

第十六章：策略建议

第17章调查会社について・免责事项

The Global Wafer Cleaning Equipment Market will grow from USD 7.23 Billion in 2025 to USD 11.42 Billion by 2031 at a 7.92% CAGR. Wafer cleaning equipment comprises specialized precision machinery designed to eliminate impurities such as particulate matter, organic contaminants, and metallic residues from semiconductor wafer surfaces without damaging delicate circuit patterns. The market is fundamentally supported by the structural shift toward increasingly miniaturized transistor architectures and the expansion of high-volume manufacturing for artificial intelligence chips, which necessitate absolute surface integrity to ensure yield reliability.

Key Market Drivers

The miniaturization of semiconductor nodes and the evolution of 3D architectures necessitate highly precise contaminant removal strategies to maintain device performance and manufacturing yields. As manufacturers transition to complex transistor designs like Gate-All-Around and vertical 3D NAND structures, the number of required cleaning steps increases to prevent fatal defects in high-aspect-ratio features. This technological imperative is driven by the rapid adoption of advanced logic nodes which require pristine surface integrity for functioning.

Key Market Challenges

The technical complexity associated with cleaning high-aspect-ratio features at advanced nodes presents a substantial barrier to the expansion of the wafer cleaning equipment market. As semiconductor architectures transition to increasingly fragile designs, the physical force required for effective impurity removal carries a heightened risk of causing structural collapse or pattern damage. This fragility forces manufacturers to invest in highly specialized, non-destructive cleaning technologies, which significantly increases development costs and lengthens the time required to validate new machinery for mass production.

Key Market Trends

The adoption of Sulfuric-Acid-Free and Green Cleaning Chemistries has become a critical trend as semiconductor manufacturers prioritize environmental sustainability and regulatory compliance alongside yield enhancement. Unlike traditional protocols heavily reliant on aggressive solvents like sulfuric acid and peroxides, this shift focuses on utilizing benign, biodegradable alternatives that minimize hazardous waste treatment costs and reduce the industry's carbon footprint. This transition is not merely experimental but is being operationalized at scale to meet stringent global environmental standards.

Key Market Players

• Applied Materials, Inc.
• Lam Research Corporation
• SCREEN Holdings Co., Ltd.
• Tokyo Electron Limited
• Veeco Instruments Inc.
• Modutek Corporation
• ACM Research, Inc.
• Entegris, Inc.
• Shibaura Mechatronics Corporation
• PVA TePla AG

Report Scope:

In this report, the Global Wafer Cleaning Equipment Market has been segmented into the following categories, in addition to the industry trends which have also been detailed below:

Wafer Cleaning Equipment Market, By Wafer Size:

• 300mm
• 200mm
• 125mm

Wafer Cleaning Equipment Market, By Functions:

• Manual Equipment
• Automatic Equipment
• Semi-Automatic Equipment

Wafer Cleaning Equipment Market, By Application:

• LED
• MEMS
• Memory
• RF Device Others

Wafer Cleaning Equipment Market, By Region:

• North America
• United States
• Canada
• Mexico
• Europe
• France
• United Kingdom
• Italy
• Germany
• Spain
• Asia Pacific
• China
• India
• Japan
• Australia
• South Korea
• South America
• Brazil
• Argentina
• Colombia
• Middle East & Africa
• South Africa
• Saudi Arabia
• UAE

Competitive Landscape

Company Profiles: Detailed analysis of the major companies present in the Global Wafer Cleaning Equipment Market.

Available Customizations:

Global Wafer Cleaning Equipment Market report with the given market data, TechSci Research offers customizations according to a company's specific needs. The following customization options are available for the report:

Company Information

• Detailed analysis and profiling of additional market players (up to five).

Table of Contents

1. Product Overview

• 1.1. Market Definition
• 1.2. Scope of the Market
  • 1.2.1. Markets Covered
  • 1.2.2. Years Considered for Study
  • 1.2.3. Key Market Segmentations

2. Research Methodology

• 2.1. Objective of the Study
• 2.2. Baseline Methodology
• 2.3. Key Industry Partners
• 2.4. Major Association and Secondary Sources
• 2.5. Forecasting Methodology
• 2.6. Data Triangulation & Validation
• 2.7. Assumptions and Limitations

3. Executive Summary

• 3.1. Overview of the Market
• 3.2. Overview of Key Market Segmentations
• 3.3. Overview of Key Market Players
• 3.4. Overview of Key Regions/Countries
• 3.5. Overview of Market Drivers, Challenges, Trends

4. Voice of Customer

5. Global Wafer Cleaning Equipment Market Outlook

• 5.1. Market Size & Forecast
  • 5.1.1. By Value
• 5.2. Market Share & Forecast
  • 5.2.1. By Wafer Size (300mm, 200mm, 125mm)
  • 5.2.2. By Functions (Manual Equipment, Automatic Equipment, Semi-Automatic Equipment)
  • 5.2.3. By Application (LED, MEMS, Memory, RF Device Others)
  • 5.2.4. By Region
  • 5.2.5. By Company (2025)
• 5.3. Market Map

6. North America Wafer Cleaning Equipment Market Outlook

• 6.1. Market Size & Forecast
  • 6.1.1. By Value
• 6.2. Market Share & Forecast
  • 6.2.1. By Wafer Size
  • 6.2.2. By Functions
  • 6.2.3. By Application
  • 6.2.4. By Country
• 6.3. North America: Country Analysis
  • 6.3.1. United States Wafer Cleaning Equipment Market Outlook
    • 6.3.1.1. Market Size & Forecast
      • 6.3.1.1.1. By Value
    • 6.3.1.2. Market Share & Forecast
      • 6.3.1.2.1. By Wafer Size
      • 6.3.1.2.2. By Functions
      • 6.3.1.2.3. By Application
  • 6.3.2. Canada Wafer Cleaning Equipment Market Outlook
    • 6.3.2.1. Market Size & Forecast
      • 6.3.2.1.1. By Value
    • 6.3.2.2. Market Share & Forecast
      • 6.3.2.2.1. By Wafer Size
      • 6.3.2.2.2. By Functions
      • 6.3.2.2.3. By Application
  • 6.3.3. Mexico Wafer Cleaning Equipment Market Outlook
    • 6.3.3.1. Market Size & Forecast
      • 6.3.3.1.1. By Value
    • 6.3.3.2. Market Share & Forecast
      • 6.3.3.2.1. By Wafer Size
      • 6.3.3.2.2. By Functions
      • 6.3.3.2.3. By Application

7. Europe Wafer Cleaning Equipment Market Outlook

• 7.1. Market Size & Forecast
  • 7.1.1. By Value
• 7.2. Market Share & Forecast
  • 7.2.1. By Wafer Size
  • 7.2.2. By Functions
  • 7.2.3. By Application
  • 7.2.4. By Country
• 7.3. Europe: Country Analysis
  • 7.3.1. Germany Wafer Cleaning Equipment Market Outlook
    • 7.3.1.1. Market Size & Forecast
      • 7.3.1.1.1. By Value
    • 7.3.1.2. Market Share & Forecast
      • 7.3.1.2.1. By Wafer Size
      • 7.3.1.2.2. By Functions
      • 7.3.1.2.3. By Application
  • 7.3.2. France Wafer Cleaning Equipment Market Outlook
    • 7.3.2.1. Market Size & Forecast
      • 7.3.2.1.1. By Value
    • 7.3.2.2. Market Share & Forecast
      • 7.3.2.2.1. By Wafer Size
      • 7.3.2.2.2. By Functions
      • 7.3.2.2.3. By Application
  • 7.3.3. United Kingdom Wafer Cleaning Equipment Market Outlook
    • 7.3.3.1. Market Size & Forecast
      • 7.3.3.1.1. By Value
    • 7.3.3.2. Market Share & Forecast
      • 7.3.3.2.1. By Wafer Size
      • 7.3.3.2.2. By Functions
      • 7.3.3.2.3. By Application
  • 7.3.4. Italy Wafer Cleaning Equipment Market Outlook
    • 7.3.4.1. Market Size & Forecast
      • 7.3.4.1.1. By Value
    • 7.3.4.2. Market Share & Forecast
      • 7.3.4.2.1. By Wafer Size
      • 7.3.4.2.2. By Functions
      • 7.3.4.2.3. By Application
  • 7.3.5. Spain Wafer Cleaning Equipment Market Outlook
    • 7.3.5.1. Market Size & Forecast
      • 7.3.5.1.1. By Value
    • 7.3.5.2. Market Share & Forecast
      • 7.3.5.2.1. By Wafer Size
      • 7.3.5.2.2. By Functions
      • 7.3.5.2.3. By Application

8. Asia Pacific Wafer Cleaning Equipment Market Outlook

• 8.1. Market Size & Forecast
  • 8.1.1. By Value
• 8.2. Market Share & Forecast
  • 8.2.1. By Wafer Size
  • 8.2.2. By Functions
  • 8.2.3. By Application
  • 8.2.4. By Country
• 8.3. Asia Pacific: Country Analysis
  • 8.3.1. China Wafer Cleaning Equipment Market Outlook
    • 8.3.1.1. Market Size & Forecast
      • 8.3.1.1.1. By Value
    • 8.3.1.2. Market Share & Forecast
      • 8.3.1.2.1. By Wafer Size
      • 8.3.1.2.2. By Functions
      • 8.3.1.2.3. By Application
  • 8.3.2. India Wafer Cleaning Equipment Market Outlook
    • 8.3.2.1. Market Size & Forecast
      • 8.3.2.1.1. By Value
    • 8.3.2.2. Market Share & Forecast
      • 8.3.2.2.1. By Wafer Size
      • 8.3.2.2.2. By Functions
      • 8.3.2.2.3. By Application
  • 8.3.3. Japan Wafer Cleaning Equipment Market Outlook
    • 8.3.3.1. Market Size & Forecast
      • 8.3.3.1.1. By Value
    • 8.3.3.2. Market Share & Forecast
      • 8.3.3.2.1. By Wafer Size
      • 8.3.3.2.2. By Functions
      • 8.3.3.2.3. By Application
  • 8.3.4. South Korea Wafer Cleaning Equipment Market Outlook
    • 8.3.4.1. Market Size & Forecast
      • 8.3.4.1.1. By Value
    • 8.3.4.2. Market Share & Forecast
      • 8.3.4.2.1. By Wafer Size
      • 8.3.4.2.2. By Functions
      • 8.3.4.2.3. By Application
  • 8.3.5. Australia Wafer Cleaning Equipment Market Outlook
    • 8.3.5.1. Market Size & Forecast
      • 8.3.5.1.1. By Value
    • 8.3.5.2. Market Share & Forecast
      • 8.3.5.2.1. By Wafer Size
      • 8.3.5.2.2. By Functions
      • 8.3.5.2.3. By Application

9. Middle East & Africa Wafer Cleaning Equipment Market Outlook

• 9.1. Market Size & Forecast
  • 9.1.1. By Value
• 9.2. Market Share & Forecast
  • 9.2.1. By Wafer Size
  • 9.2.2. By Functions
  • 9.2.3. By Application
  • 9.2.4. By Country
• 9.3. Middle East & Africa: Country Analysis
  • 9.3.1. Saudi Arabia Wafer Cleaning Equipment Market Outlook
    • 9.3.1.1. Market Size & Forecast
      • 9.3.1.1.1. By Value
    • 9.3.1.2. Market Share & Forecast
      • 9.3.1.2.1. By Wafer Size
      • 9.3.1.2.2. By Functions
      • 9.3.1.2.3. By Application
  • 9.3.2. UAE Wafer Cleaning Equipment Market Outlook
    • 9.3.2.1. Market Size & Forecast
      • 9.3.2.1.1. By Value
    • 9.3.2.2. Market Share & Forecast
      • 9.3.2.2.1. By Wafer Size
      • 9.3.2.2.2. By Functions
      • 9.3.2.2.3. By Application
  • 9.3.3. South Africa Wafer Cleaning Equipment Market Outlook
    • 9.3.3.1. Market Size & Forecast
      • 9.3.3.1.1. By Value
    • 9.3.3.2. Market Share & Forecast
      • 9.3.3.2.1. By Wafer Size
      • 9.3.3.2.2. By Functions
      • 9.3.3.2.3. By Application

10. South America Wafer Cleaning Equipment Market Outlook

• 10.1. Market Size & Forecast
  • 10.1.1. By Value
• 10.2. Market Share & Forecast
  • 10.2.1. By Wafer Size
  • 10.2.2. By Functions
  • 10.2.3. By Application
  • 10.2.4. By Country
• 10.3. South America: Country Analysis
  • 10.3.1. Brazil Wafer Cleaning Equipment Market Outlook
    • 10.3.1.1. Market Size & Forecast
      • 10.3.1.1.1. By Value
    • 10.3.1.2. Market Share & Forecast
      • 10.3.1.2.1. By Wafer Size
      • 10.3.1.2.2. By Functions
      • 10.3.1.2.3. By Application
  • 10.3.2. Colombia Wafer Cleaning Equipment Market Outlook
    • 10.3.2.1. Market Size & Forecast
      • 10.3.2.1.1. By Value
    • 10.3.2.2. Market Share & Forecast
      • 10.3.2.2.1. By Wafer Size
      • 10.3.2.2.2. By Functions
      • 10.3.2.2.3. By Application
  • 10.3.3. Argentina Wafer Cleaning Equipment Market Outlook
    • 10.3.3.1. Market Size & Forecast
      • 10.3.3.1.1. By Value
    • 10.3.3.2. Market Share & Forecast
      • 10.3.3.2.1. By Wafer Size
      • 10.3.3.2.2. By Functions
      • 10.3.3.2.3. By Application

11. Market Dynamics

• 11.1. Drivers
• 11.2. Challenges

12. Market Trends & Developments

• 12.1. Merger & Acquisition (If Any)
• 12.2. Product Launches (If Any)
• 12.3. Recent Developments

13. Global Wafer Cleaning Equipment Market: SWOT Analysis

14. Porter's Five Forces Analysis

• 14.1. Competition in the Industry
• 14.2. Potential of New Entrants
• 14.3. Power of Suppliers
• 14.4. Power of Customers
• 14.5. Threat of Substitute Products

15. Competitive Landscape

• 15.1. Applied Materials, Inc.
  • 15.1.1. Business Overview
  • 15.1.2. Products & Services
  • 15.1.3. Recent Developments
  • 15.1.4. Key Personnel
  • 15.1.5. SWOT Analysis
• 15.2. Lam Research Corporation
• 15.3. SCREEN Holdings Co., Ltd.
• 15.4. Tokyo Electron Limited
• 15.5. Veeco Instruments Inc.
• 15.6. Modutek Corporation
• 15.7. ACM Research, Inc.
• 15.8. Entegris, Inc.
• 15.9. Shibaura Mechatronics Corporation
• 15.10. PVA TePla AG

16. Strategic Recommendations

17. About Us & Disclaimer