微影术计量设备市场规模、份额和成长分析（按设备类型、技术、应用、最终用户产业、自动化程度和地区划分）－产业预测，2026-2033年

全球微影术计量设备市场预计到 2024 年将达到 37.4 亿美元，到 2025 年将达到 40 亿美元，到 2033 年将达到 68.2 亿美元，预测期（2026-2033 年）的复合年增长率为 6.9%。

在半导体产业，微影术计量设备市场对于确保积体电路製造所需的精度至关重要。随着产业朝向更小的节点尺寸和更复杂的设计发展，对高解析度计量工具的需求呈现爆炸性成长。关键成长要素包括对小型化的不懈追求、家用电子电器需求的不断增长以及5G、人工智慧和物联网(IoT)等技术的兴起。计量设备确保製造商满足装置最佳性能所需的严格公差。光学和成像技术的进步催生了能够进行奈米级测量的精密系统，从而提升了尖端积体电路生产的品管。此外，随着向极紫外光刻技术的过渡，能够有效支援这些创新光刻製程的计量解决方案也至关重要。

全球微影术计量设备市场驱动因素

对更小、更有效率电子设备的不懈追求推动了半导体製造技术的显着进步。在此背景下，微影术计量设备对于在整个製造过程中保持精度至关重要。随着晶片尺寸的缩小和复杂性的增加，对先进计量工具的需求也随之成长。这种对先进计量设备日益增长的需求正在推动微影术计量设备市场的发展，製造商不仅致力于提升生产能力，也力求应对半导体领域最尖端科技创新带来的挑战。

限制全球微影术计量设备市场的因素

全球微影术计量设备市场面临许多挑战，其中涉及的先进技术包括复杂的光学元件、感测器和软体。这种复杂性需要大量的初始投资和持续的维护成本，这对中小製造商和研究机构造成了财务障碍。因此，这些机构可能不愿意采用最新的计量解决方案，限制了其市场竞争力。购置和维护先进微影术计量设备的高成本可能会限制市场成长和创新，因为只有拥有充足资源的大型企业才能充分利用这些先进技术。

全球微影术测量设备市场趋势

全球微影术计量设备市场正经历着一个显着的发展趋势，其特点是先进技术的融合，以满足半导体製造不断变化的需求。随着製程日益复杂，设备也在不断改进，以提供更高的精度、准确度和效率。关键的进步包括采用先进的成像技术，例如多模态成像和多光束成像，以及利用人工智慧 (AI) 和机器学习进行即时数据分析和最佳化。这一趋势体现了企业积极应对规模化挑战的态度，并认识到提高半导体製造的製程控制至关重要，这能确保製造商保持竞争优势。

目录

介绍

• 调查目标
• 调查范围
• 定义

调查方法

• 资讯收集
• 二手资料和一手资料方法
• 市场规模预测
• 市场假设与限制

执行摘要

• 全球市场展望
• 供需趋势分析
• 细分市场机会分析

市场动态与展望

• 市场规模
• 市场动态
  • 驱动因素和机会
  • 限制与挑战
• 波特分析

关键市场考察

• 关键成功因素
• 竞争程度
• 关键投资机会
• 市场生态系统
• 市场吸引力指数（2025）
• PESTEL 分析
• 总体经济指标
• 价值链分析
• 定价分析

全球微影术计量设备市场规模（按设备类型和复合年增长率划分）（2026-2033 年）

• 光学微影术测量设备
• X射线微影术测量设备
• 电子束微影术测量设备
• 掩模/蚀刻微影术测量设备
• 其他微影术计量工具

全球微影术计量设备市场依技术及复合年增长率划分（2026-2033 年）

• 接触式光刻
• 近距离暴露
• 投影光刻
• 极紫外线（EUV）光刻
• 下一代微影术（NGL）

全球微影术计量设备市场规模（按应用及复合年增长率划分）（2026-2033 年）

• 半导体製造
• 微机电系统（MEMS）
• 印刷基板（PCB）製造
• 光子装置
• 奈米科技

全球微影术计量设备市场规模（按终端用户产业划分）及复合年增长率（2026-2033 年）

• 家用电子电器
• 电讯
• 车
• 卫生保健
• 航太/国防

全球微影术计量设备市场按自动化程度和复合年增长率划分（2026-2033 年）

• 全自动微影术测量设备
• 半自动微影术测量设备
• 手动微影术计量设备

全球微影术计量设备市场规模及复合年增长率（2026-2033）

• 北美洲
  • 美国
  • 加拿大
• 欧洲
  • 德国
  • 西班牙
  • 法国
  • 英国
  • 义大利
  • 其他欧洲
• 亚太地区
  • 中国
  • 印度
  • 日本
  • 韩国
  • 亚太其他地区
• 拉丁美洲
  • 巴西
  • 其他拉丁美洲
• 中东和非洲
  • 海湾合作委员会国家
  • 南非
  • 其他中东和非洲地区

竞争资讯

• 前五大公司对比
• 主要企业的市场定位（2025 年）
• 主要市场参与者所采取的策略
• 近期市场趋势
• 公司市占率分析（2025 年）
• 主要企业公司简介
  • 公司详情
  • 产品系列分析
  • 依业务板块进行公司股票分析
  • 2023-2025年营收年比比较

主要企业简介

• ASML Holding NV（Netherlands）
• KLA Corporation（US）
• Applied Materials, Inc.（US）
• Nikon Corporation（Japan）
• Canon Inc.（Japan）
• Tokyo Electron Limited（Japan）
• Hitachi High-Technologies Corporation（Japan）
• Veeco Instruments Inc.（US）
• SUSS MicroTec SE（Germany）
• EV Group（Austria）
• Advantest Corporation（Japan）
• Nova Measuring Instruments Ltd.（Israel）
• Rudolph Technologies, Inc.（US）
• Onto Innovation Inc.（US）
• Zeiss（Germany）
• Oxford Instruments plc（UK）
• SEMATECH（US）
• IMEC（Belgium）
• Fraunhofer Institute（Germany）

结论与建议

Global Lithography Metrology Equipment Market size was valued at USD 3.74 Billion in 2024 and is poised to grow from USD 4 Billion in 2025 to USD 6.82 Billion by 2033, growing at a CAGR of 6.9% during the forecast period (2026-2033).

The Global Lithography Metrology Equipment Market is essential in the semiconductor sector, ensuring the precision needed for integrated circuit manufacturing. As the industry progresses toward smaller node sizes and more intricate designs, the demand for high-resolution metrology tools has skyrocketed. Key growth drivers include the relentless pursuit of miniaturization, increased consumer electronics demand, and the emergence of technologies like 5G, artificial intelligence, and the Internet of Things. Metrology equipment ensures manufacturers meet stringent tolerances required for optimal device performance. Technological advancements in optical and imaging technologies have produced sophisticated systems capable of nanoscale measurements, enhancing quality control in cutting-edge IC production. Furthermore, the shift toward extreme ultraviolet lithography necessitates metrology solutions that effectively support these innovative lithography processes.

Top-down and bottom-up approaches were used to estimate and validate the size of the Global Lithography Metrology Equipment market and to estimate the size of various other dependent submarkets. The research methodology used to estimate the market size includes the following details: The key players in the market were identified through secondary research, and their market shares in the respective regions were determined through primary and secondary research. This entire procedure includes the study of the annual and financial reports of the top market players and extensive interviews for key insights from industry leaders such as CEOs, VPs, directors, and marketing executives. All percentage shares split, and breakdowns were determined using secondary sources and verified through Primary sources. All possible parameters that affect the markets covered in this research study have been accounted for, viewed in extensive detail, verified through primary research, and analyzed to get the final quantitative and qualitative data.

Global Lithography Metrology Equipment Market Segments Analysis

Global Lithography Metrology Equipment Market is segmented by Type of Equipment, Technology, Application, End-User Industry, Level of Automation and region. Based on Type of Equipment, the market is segmented into Optical Lithography Metrology Equipment, X-ray Lithography Metrology Equipment, E-Beam Lithography Metrology Equipment, Mask/Etch Metrology Equipment and Other Lithography Metrology Equipment. Based on Technology, the market is segmented into Contact Lithography, Proximity Lithography, Projection Lithography, Extreme Ultraviolet (EUV) Lithography and Next-Generation Lithography (NGL). Based on Application, the market is segmented into Semiconductor Manufacturing, Microelectromechanical Systems (MEMS), Printed Circuit Board (PCB) Production, Photonic Devices and Nanotechnology. Based on End-User Industry, the market is segmented into Consumer Electronics, Telecommunications, Automotive, Healthcare and Aerospace and Defense. Based on Level of Automation, the market is segmented into Fully Automated Lithography Metrology Equipment, Semi-Automated Lithography Metrology Equipment and Manual Lithography Metrology Equipment. Based on region, the market is segmented into North America, Europe, Asia Pacific, Latin America and Middle East & Africa.

Driver of the Global Lithography Metrology Equipment Market

The relentless pursuit of smaller and more efficient electronic devices has spurred significant advancements in semiconductor manufacturing technologies. In this context, lithography metrology equipment is essential for maintaining accuracy and precision throughout the fabrication process. As the features of chips become increasingly minute and intricate, the demand for advanced metrology tools escalates correspondingly. This growing need for sophisticated measurement instruments not only enhances the manufacturing capabilities but also drives the market for lithography metrology equipment, as manufacturers strive to meet the challenges posed by cutting-edge technological innovations in the semiconductor sector.

Restraints in the Global Lithography Metrology Equipment Market

The Global Lithography Metrology Equipment market faces challenges due to the advanced technology involved, which encompasses intricate optics, sensors, and software. This complexity contributes to significant initial investment and ongoing maintenance expenses, creating financial barriers for smaller manufacturers and research institutions. As a result, these entities may be hesitant to embrace the latest metrology solutions, limiting their ability to remain competitive in the market. The high costs associated with acquiring and maintaining sophisticated lithography metrology equipment can restrict market growth and innovation as only larger players with sufficient resources can fully leverage these advanced technologies.

Market Trends of the Global Lithography Metrology Equipment Market

The global lithography metrology equipment market is experiencing a significant trend characterized by the integration of advanced technologies to meet the evolving demands of semiconductor manufacturing. As processes grow increasingly complex, the equipment is adapting to deliver enhanced precision, accuracy, and efficiency. Key advancements include the implementation of sophisticated imaging techniques, such as multi-modal and multi-beam imaging, alongside the utilization of artificial intelligence (AI) and machine learning for real-time data analysis and optimization. This trend reflects a proactive approach to tackle the challenges of shrinking feature sizes and the critical need for improved process control in semiconductor fabrication, ensuring manufacturers can maintain competitive advantages.

Table of Contents

Introduction

• Objectives of the Study
• Scope of the Report
• Definitions

Research Methodology

• Information Procurement
• Secondary & Primary Data Methods
• Market Size Estimation
• Market Assumptions & Limitations

Executive Summary

• Global Market Outlook
• Supply & Demand Trend Analysis
• Segmental Opportunity Analysis

Market Dynamics & Outlook

• Market Overview
• Market Size
• Market Dynamics
  • Drivers & Opportunities
  • Restraints & Challenges
• Porters Analysis
  • Competitive rivalry
  • Threat of substitute
  • Bargaining power of buyers
  • Threat of new entrants
  • Bargaining power of suppliers

Key Market Insights

• Key Success Factors
• Degree of Competition
• Top Investment Pockets
• Market Ecosystem
• Market Attractiveness Index, 2025
• PESTEL Analysis
• Macro-Economic Indicators
• Value Chain Analysis
• Pricing Analysis

Global Lithography Metrology Equipment Market Size by Type of Equipment & CAGR (2026-2033)

• Market Overview
• Optical Lithography Metrology Equipment
• X-ray Lithography Metrology Equipment
• E-Beam Lithography Metrology Equipment
• Mask/Etch Metrology Equipment
• Other Lithography Metrology Equipment

Global Lithography Metrology Equipment Market Size by Technology & CAGR (2026-2033)

• Market Overview
• Contact Lithography
• Proximity Lithography
• Projection Lithography
• Extreme Ultraviolet (EUV) Lithography
• Next-Generation Lithography (NGL)

Global Lithography Metrology Equipment Market Size by Application & CAGR (2026-2033)

• Market Overview
• Semiconductor Manufacturing
• Microelectromechanical Systems (MEMS)
• Printed Circuit Board (PCB) Production
• Photonic Devices
• Nanotechnology

Global Lithography Metrology Equipment Market Size by End-User Industry & CAGR (2026-2033)

• Market Overview
• Consumer Electronics
• Telecommunications
• Automotive
• Healthcare
• Aerospace and Defense

Global Lithography Metrology Equipment Market Size by Level of Automation & CAGR (2026-2033)

• Market Overview
• Fully Automated Lithography Metrology Equipment
• Semi-Automated Lithography Metrology Equipment
• Manual Lithography Metrology Equipment

Global Lithography Metrology Equipment Market Size & CAGR (2026-2033)

• North America (Type of Equipment, Technology, Application, End-User Industry, Level of Automation)
  • US
  • Canada
• Europe (Type of Equipment, Technology, Application, End-User Industry, Level of Automation)
  • Germany
  • Spain
  • France
  • UK
  • Italy
  • Rest of Europe
• Asia Pacific (Type of Equipment, Technology, Application, End-User Industry, Level of Automation)
  • China
  • India
  • Japan
  • South Korea
  • Rest of Asia-Pacific
• Latin America (Type of Equipment, Technology, Application, End-User Industry, Level of Automation)
  • Brazil
  • Rest of Latin America
• Middle East & Africa (Type of Equipment, Technology, Application, End-User Industry, Level of Automation)
  • GCC Countries
  • South Africa
  • Rest of Middle East & Africa

Competitive Intelligence

• Top 5 Player Comparison
• Market Positioning of Key Players, 2025
• Strategies Adopted by Key Market Players
• Recent Developments in the Market
• Company Market Share Analysis, 2025
• Company Profiles of All Key Players
  • Company Details
  • Product Portfolio Analysis
  • Company's Segmental Share Analysis
  • Revenue Y-O-Y Comparison (2023-2025)

Key Company Profiles

• ASML Holding N.V. (Netherlands)
  • Company Overview
  • Business Segment Overview
  • Financial Updates
  • Key Developments
• KLA Corporation (US)
  • Company Overview
  • Business Segment Overview
  • Financial Updates
  • Key Developments
• Applied Materials, Inc. (US)
  • Company Overview
  • Business Segment Overview
  • Financial Updates
  • Key Developments
• Nikon Corporation (Japan)
  • Company Overview
  • Business Segment Overview
  • Financial Updates
  • Key Developments
• Canon Inc. (Japan)
  • Company Overview
  • Business Segment Overview
  • Financial Updates
  • Key Developments
• Tokyo Electron Limited (Japan)
  • Company Overview
  • Business Segment Overview
  • Financial Updates
  • Key Developments
• Hitachi High-Technologies Corporation (Japan)
  • Company Overview
  • Business Segment Overview
  • Financial Updates
  • Key Developments
• Veeco Instruments Inc. (US)
  • Company Overview
  • Business Segment Overview
  • Financial Updates
  • Key Developments
• SUSS MicroTec SE (Germany)
  • Company Overview
  • Business Segment Overview
  • Financial Updates
  • Key Developments
• EV Group (Austria)
  • Company Overview
  • Business Segment Overview
  • Financial Updates
  • Key Developments
• Advantest Corporation (Japan)
  • Company Overview
  • Business Segment Overview
  • Financial Updates
  • Key Developments
• Nova Measuring Instruments Ltd. (Israel)
  • Company Overview
  • Business Segment Overview
  • Financial Updates
  • Key Developments
• Rudolph Technologies, Inc. (US)
  • Company Overview
  • Business Segment Overview
  • Financial Updates
  • Key Developments
• Onto Innovation Inc. (US)
  • Company Overview
  • Business Segment Overview
  • Financial Updates
  • Key Developments
• Zeiss (Germany)
  • Company Overview
  • Business Segment Overview
  • Financial Updates
  • Key Developments
• Oxford Instruments plc (UK)
  • Company Overview
  • Business Segment Overview
  • Financial Updates
  • Key Developments
• SEMATECH (US)
  • Company Overview
  • Business Segment Overview
  • Financial Updates
  • Key Developments
• IMEC (Belgium)
  • Company Overview
  • Business Segment Overview
  • Financial Updates
  • Key Developments
• Fraunhofer Institute (Germany)
  • Company Overview
  • Business Segment Overview
  • Financial Updates
  • Key Developments

Conclusion & Recommendations